Invention Grant
- Patent Title: Method and apparatus for depositing LED organic film
- Patent Title (中): 用于沉积LED有机膜的方法和装置
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Application No.: US11282472Application Date: 2005-11-21
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Publication No.: US08128753B2Publication Date: 2012-03-06
- Inventor: Vladimir Bulovic , Marc A. Baldo , Martin A. Schmidt , Valerie LeBlanc , Jianglong Chen
- Applicant: Vladimir Bulovic , Marc A. Baldo , Martin A. Schmidt , Valerie LeBlanc , Jianglong Chen
- Applicant Address: US MA Cambridge
- Assignee: Massachusetts Institute of Technology
- Current Assignee: Massachusetts Institute of Technology
- Current Assignee Address: US MA Cambridge
- Agent Dianoosh Salehi; Jeffrey D. Frazier
- Main IPC: C23C14/12
- IPC: C23C14/12
Abstract:
In one embodiment the disclosure relates to an apparatus for depositing an organic material on a substrate, including a source heater for heating organic particles to form suspended organic particles; a transport stream for delivering the suspended organic particles to a discharge nozzle, the discharge nozzle having a plurality of micro-pores, the micro-pores providing a conduit for passage of the suspended organic particles; and a nozzle heater for pulsatingly heating the micro-pores nozzle to discharge the suspended organic particles from the discharge nozzle.
Public/Granted literature
- US20060115585A1 Method and apparatus for depositing LED organic film Public/Granted day:2006-06-01
Information query
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