发明授权
- 专利标题: Stressed transistors with reduced leakage
- 专利标题(中): 压力降低的晶体管泄漏
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申请号: US12694603申请日: 2010-01-27
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公开(公告)号: US08138791B1公开(公告)日: 2012-03-20
- 发明人: Albert Ratnakumar , Jun Liu , Jeffrey Xiaoqi Tung , Qi Xiang
- 申请人: Albert Ratnakumar , Jun Liu , Jeffrey Xiaoqi Tung , Qi Xiang
- 申请人地址: US CA San Jose
- 专利权人: Altera Corporation
- 当前专利权人: Altera Corporation
- 当前专利权人地址: US CA San Jose
- 代理机构: Treyz Law Group
- 代理商 Jason Tsai
- 主分类号: H03K19/177
- IPC分类号: H03K19/177
摘要:
Integrated circuits with stressed transistors are provided. Stressing transistors may increase transistor threshold voltage without the need to increase channel doping. Stressing transistors may reduce total leakage currents. It may be desirable to compressively stress N-channel metal-oxide-semiconductor (NMOS) transistors and tensilely stress P-channel metal-oxide-semiconductor (PMOS) transistors to reduce leakage currents. Techniques that can be used to alter the amount of stressed experienced by transistors may include forming a stress-inducing layer, forming a stress liner, forming diffusion active regions using silicon germanium, silicon carbon, or standard silicon, implementing transistors in single-finger instead of multi-finger configurations, and implanting particles. Any combination of these techniques may be used to provide appropriate amounts of stress to increase the performance or decrease the total leakage current of a transistor.
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