Invention Grant
- Patent Title: Backside mounted electrode carriers and assemblies incorporating the same
- Patent Title (中): 背面安装的电极载体和包含其的组件
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Application No.: US12164285Application Date: 2008-06-30
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Publication No.: US08171877B2Publication Date: 2012-05-08
- Inventor: Jason Augustino , Armen Avoyan , Yan Fang , Duane Outka , Hong Shih , Stephen Whitten
- Applicant: Jason Augustino , Armen Avoyan , Yan Fang , Duane Outka , Hong Shih , Stephen Whitten
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Dinsmore & Shohl LLP
- Main IPC: B05C13/00
- IPC: B05C13/00 ; B05C13/02 ; B05C21/00 ; C23C16/00 ; C23C16/50 ; C23F1/00 ; H01L21/306

Abstract:
A carrier assembly is provided comprising a backside mounted electrode carrier and electrode mounting hardware. The backside mounted electrode carrier comprises an electrode accommodating aperture, which in turn comprises a sidewall structure that is configured to limit lateral movement of an electrode positioned in the aperture. The electrode accommodating aperture further comprises one or more sidewall projections that support the weight of an electrode positioned in the aperture. The electrode mounting hardware is configured to engage an electrode positioned in the electrode accommodating aperture from the backside of the carrier and urge the electrode against the sidewall projections so as to limit axial movement of the electrode in the electrode accommodating aperture. Additional embodiments of broader and narrower scope are contemplated.
Public/Granted literature
- US20120013242A9 BACKSIDE MOUNTED ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATING THE SAME Public/Granted day:2012-01-19
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