发明授权
- 专利标题: Backside mounted electrode carriers and assemblies incorporating the same
- 专利标题(中): 背面安装的电极载体和包含其的组件
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申请号: US12164285申请日: 2008-06-30
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公开(公告)号: US08171877B2公开(公告)日: 2012-05-08
- 发明人: Jason Augustino , Armen Avoyan , Yan Fang , Duane Outka , Hong Shih , Stephen Whitten
- 申请人: Jason Augustino , Armen Avoyan , Yan Fang , Duane Outka , Hong Shih , Stephen Whitten
- 申请人地址: US CA Fremont
- 专利权人: Lam Research Corporation
- 当前专利权人: Lam Research Corporation
- 当前专利权人地址: US CA Fremont
- 代理机构: Dinsmore & Shohl LLP
- 主分类号: B05C13/00
- IPC分类号: B05C13/00 ; B05C13/02 ; B05C21/00 ; C23C16/00 ; C23C16/50 ; C23F1/00 ; H01L21/306
摘要:
A carrier assembly is provided comprising a backside mounted electrode carrier and electrode mounting hardware. The backside mounted electrode carrier comprises an electrode accommodating aperture, which in turn comprises a sidewall structure that is configured to limit lateral movement of an electrode positioned in the aperture. The electrode accommodating aperture further comprises one or more sidewall projections that support the weight of an electrode positioned in the aperture. The electrode mounting hardware is configured to engage an electrode positioned in the electrode accommodating aperture from the backside of the carrier and urge the electrode against the sidewall projections so as to limit axial movement of the electrode in the electrode accommodating aperture. Additional embodiments of broader and narrower scope are contemplated.
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