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公开(公告)号：US08221552B2
公开(公告)日：2012-07-17
申请号：US11730296
申请日：2007-03-30
申请人： Duane Outka , Jason Augustino , Armen Avoyan , Stephen Whitten , Hong Shih , Yan Fang
发明人： Duane Outka , Jason Augustino , Armen Avoyan , Stephen Whitten , Hong Shih , Yan Fang
CPC分类号： B08B3/04 , H01J37/32862
摘要： Methods of cleaning plasma processing chamber components include contacting surfaces of the components with a cleaning solution, while avoiding damage of other surfaces or areas of the components by the cleaning solution. An exemplary plasma processing chamber component to be cleaning is an elastomer bonded electrode assembly having a silicon member with a plasma-exposed silicon surface, a backing member, and an elastomer bonding material between the silicon surface and the backing member.
摘要翻译： 清洁等离子体处理室部件的方法包括将部件的表面与清洁溶液接触，同时避免清洁溶液损坏其它表面或部件区域。 要清洁的示例性等离子体处理室部件是具有硅构件的弹性体接合电极组件，其具有等离子体暴露的硅表面，背衬构件和在硅表面和背衬构件之间的弹性体接合材料。
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2.发明申请公开(公告)号：US20120013242A9
公开(公告)日：2012-01-19
申请号：US12164285
申请日：2008-06-30
申请人： Jason Augustino , Armen Avoyan , Yan Fang , Duane Outka , Hong Shih , Stephen Whitten
发明人： Jason Augustino , Armen Avoyan , Yan Fang , Duane Outka , Hong Shih , Stephen Whitten
IPC分类号： H01J19/42
CPC分类号： H01J37/32568 , H01J37/32091 , H01J37/32605
摘要： A carrier assembly is provided comprising a backside mounted electrode carrier and electrode mounting hardware. The backside mounted electrode carrier comprises an electrode accommodating aperture, which in turn comprises a sidewall structure that is configured to limit lateral movement of an electrode positioned in the aperture. The electrode accommodating aperture further comprises one or more sidewall projections that support the weight of an electrode positioned in the aperture. The electrode mounting hardware is configured to engage an electrode positioned in the electrode accommodating aperture from the backside of the carrier and urge the electrode against the sidewall projections so as to limit axial movement of the electrode in the electrode accommodating aperture. Additional embodiments of broader and narrower scope are contemplated.
摘要翻译： 提供的载体组件包括背面安装的电极载体和电极安装硬件。 背面安装的电极载体包括电极容纳孔，电极容纳孔又包括被配置为限制定位在孔中的电极的横向移动的侧壁结构。 电极容纳孔还包括支撑位于孔中的电极的重量的一个或多个侧壁突起。 电极安装硬件被配置成从位于载体的背面的电极容纳孔中的电极接合，并且将电极推靠在侧壁突起上，以限制电极在电极容纳孔中的轴向移动。 考虑到更广泛和更窄范围的另外的实施例。
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公开(公告)号：US08075701B2
公开(公告)日：2011-12-13
申请号：US12164294
申请日：2008-06-30
申请人： Armen Avoyan , Yan Fang , Duane Outka , Hong Shih , Stephen Whitten
发明人： Armen Avoyan , Yan Fang , Duane Outka , Hong Shih , Stephen Whitten
CPC分类号： H01J37/32862 , H01J37/32559
摘要： A process for reconditioning a multi-component electrode comprising a silicon electrode bonded to an electrically conductive backing plate is provided. The process comprises: (i) removing metal ions from the multi-component electrode by soaking the multi-component electrode in a substantially alcohol-free DSP solution comprising sulfuric acid, hydrogen peroxide, and water and rinsing the multi-component electrode with de-ionized water; (ii) polishing one or more surfaces of the multi-component electrode following removal of metal ions there from; and (iii) removing contaminants from silicon surfaces of the multi-component electrode by treating the polished multi-component electrode with a mixed acid solution comprising hydrofluoric acid, nitric acid, acetic acid, and water and by rinsing the treated multi-component electrode with de-ionized water. Additional embodiments of broader and narrower scope are contemplated.
摘要翻译： 提供了一种用于再生多组分电极的方法，其包括结合到导电背板的硅电极。 该方法包括：（i）通过将多组分电极浸入含有硫酸，过氧化氢和水的基本上不含醇的DSP溶液中并从而从多组分电极中除去金属离子，并用去离子水冲洗多组分电极， 电离水; （ii）在从其去除金属离子之后抛光多组分电极的一个或多个表面; 和（iii）通过用包含氢氟酸，硝酸，乙酸和水的混合酸溶液处理抛光的多组分电极，并通过用处理过的多组分电极进行漂洗来处理多组分电极的硅表面的污染物 去离子水。 考虑到更广泛和更窄范围的另外的实施例。
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公开(公告)号：US20080236618A1
公开(公告)日：2008-10-02
申请号：US11730296
申请日：2007-03-30
申请人： Duane Outka , Jason Augustino , Armen Avoyan , Stephen Whitten , Hong Shih , Yan Fang
发明人： Duane Outka , Jason Augustino , Armen Avoyan , Stephen Whitten , Hong Shih , Yan Fang
CPC分类号： B08B3/04 , H01J37/32862
摘要： Methods of cleaning plasma processing chamber components include contacting surfaces of the components with a cleaning solution, while avoiding damage of other surfaces or areas of the components by the cleaning solution. An exemplary plasma processing chamber component to be cleaning is an elastomer bonded electrode assembly having a silicon member with a plasma-exposed silicon surface, a backing member, and an elastomer bonding material between the silicon surface and the backing member.
摘要翻译： 清洁等离子体处理室部件的方法包括将部件的表面与清洁溶液接触，同时避免清洁溶液损坏其它表面或部件区域。 要清洁的示例性等离子体处理室部件是具有硅构件的弹性体接合电极组件，其具有等离子体暴露的硅表面，背衬构件和在硅表面和背衬构件之间的弹性体接合材料。
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公开(公告)号：US07327253B2
公开(公告)日：2008-02-05
申请号：US11121189
申请日：2005-05-04
IPC分类号： G08B13/00
CPC分类号： G08B5/38 , G08B13/19 , G08B13/1963 , G08B13/19643 , G08B13/19652
摘要： An intruder detection and warning system has a plurality of infrared sensors for receiving infrared radiation from respective contiguous areas of premises in need of security. A central illumination unit including a rotatable light is operated to project a beam illuminating a selected one of the contiguous areas of the premises in response to the received infrared radiation by the infrared sensor in the selected area indicating presence of a person in the selected area. Initially a polite message randomly selected from a group of different polite messages is broadcast to request the intruder to leave the premises. When continued presence of the intruder is detected, the light beam is moved away from and then back to the selected area and a further message randomly selected from a group of different more demanding messages is broadcast to demand the intruder to leave the premises. Thus computerized control of the central illumination unit to selectively illuminate areas monitored by respective infrared sensors to detect intruders mimics manual monitoring and security enforcement to more effectively deter intruders. Control of the illumination unit with an associated video camera is passed to a remote monitoring station upon continued failure of the intruder to vacate the premises.
摘要翻译： 入侵者检测和警报系统具有多个红外传感器，用于从需要安全的房屋的相邻连续区域接收红外辐射。 操作包括可旋转光的中央照明单元，以响应于所选区域中的红外传感器接收到的红外线辐射来照亮所述房屋的选定的一个连续区域的光束，指示所选区域中的人的存在。 最初，广播一组从不同礼貌消息中随机选择的礼貌消息，要求入境者离开场所。 当检测到入侵者的持续存在时，光束被移动离开然后返回到所选择的区域，并且从一组不同的更苛刻的消息中随机选择的另外的消息被广播以要求入侵者离开房屋。 因此，中央照明单元的计算机化控制以选择性地照亮由相应的红外传感器监测的区域以检测入侵者模仿手动监视和安全执行，以更有效地阻止入侵者。 使用相关摄像机对照明单元的控制在入侵者继续出现故障时被传送到远程监控站，以便腾出房屋。
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6.发明授权公开(公告)号：US08276604B2
公开(公告)日：2012-10-02
申请号：US12164288
申请日：2008-06-30
申请人： Jason Augustino , Armen Avoyan , Yan Fang , Duane Outka , Hong Shih , Stephen Whitten
发明人： Jason Augustino , Armen Avoyan , Yan Fang , Duane Outka , Hong Shih , Stephen Whitten
CPC分类号： H01J37/32541 , H01J37/32009 , H01J37/32605 , H01L21/67069
摘要： In accordance with one embodiment of the present disclosure, an assembly is provided comprising a multi-component electrode and a peripherally engaging electrode carrier. The peripherally engaging electrode carrier comprises a carrier frame and a plurality of reciprocating electrode supports. The multi-component electrode is positioned in the electrode accommodating aperture of the carrier frame. The backing plate of the electrode comprises a plurality of mounting recesses formed about its periphery. The reciprocating electrode supports can be reciprocated into and out of the mounting recesses. Additional embodiments of broader and narrower scope are contemplated.
摘要翻译： 根据本公开的一个实施例，提供了包括多组分电极和外围接合电极载体的组件。 外周接合电极载体包括载体框架和多个往复电极支撑件。 多组分电极位于载体框架的电极容纳孔中。 电极的背板包括围绕其周边形成的多个安装凹部。 往复式电极支撑件可以往复运动进入和离开安装凹槽。 考虑到更广泛和更窄范围的另外的实施例。
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7.发明申请公开(公告)号：US20090322199A1
公开(公告)日：2009-12-31
申请号：US12164285
申请日：2008-06-30
申请人： Jason Augustino , Armen Avoyan , Yan Fang , Duane Outka , Hong Shih , Stephen Whitten
发明人： Jason Augustino , Armen Avoyan , Yan Fang , Duane Outka , Hong Shih , Stephen Whitten
IPC分类号： H01J19/42
CPC分类号： H01J37/32568 , H01J37/32091 , H01J37/32605
摘要： A carrier assembly is provided comprising a backside mounted electrode carrier and electrode mounting hardware. The backside mounted electrode carrier comprises an electrode accommodating aperture, which in turn comprises a sidewall structure that is configured to limit lateral movement of an electrode positioned in the aperture. The electrode accommodating aperture further comprises one or more sidewall projections that support the weight of an electrode positioned in the aperture. The electrode mounting hardware is configured to engage an electrode positioned in the electrode accommodating aperture from the backside of the carrier and urge the electrode against the sidewall projections so as to limit axial movement of the electrode in the electrode accommodating aperture. Additional embodiments of broader and narrower scope are contemplated.
摘要翻译： 提供的载体组件包括背面安装的电极载体和电极安装硬件。 背面安装的电极载体包括电极容纳孔，电极容纳孔又包括被配置为限制定位在孔中的电极的横向移动的侧壁结构。 电极容纳孔还包括支撑位于孔中的电极的重量的一个或多个侧壁突起。 电极安装硬件被配置成从位于载体的背面的电极容纳孔中的电极接合，并且将电极推靠在侧壁突起上，以限制电极在电极容纳孔中的轴向移动。 考虑到更广泛和更窄范围的另外的实施例。
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公开(公告)号：US20090325320A1
公开(公告)日：2009-12-31
申请号：US12164294
申请日：2008-06-30
申请人： Armen Avoyan , Yan Fang , Duane Outka , Hong Shih , Stephen Whitten
发明人： Armen Avoyan , Yan Fang , Duane Outka , Hong Shih , Stephen Whitten
IPC分类号： H01L21/306 , C23G1/00
CPC分类号： H01J37/32862 , H01J37/32559
摘要： A process for reconditioning a multi-component electrode comprising a silicon electrode bonded to an electrically conductive backing plate is provided. The process comprises: (i) removing metal ions from the multi-component electrode by soaking the multi-component electrode in a substantially alcohol-free DSP solution comprising sulfuric acid, hydrogen peroxide, and water and rinsing the multi-component electrode with de-ionized water; (ii) polishing one or more surfaces of the multi-component electrode following removal of metal ions there from; and (iii) removing contaminants from silicon surfaces of the multi-component electrode by treating the polished multi-component electrode with a mixed acid solution comprising hydrofluoric acid, nitric acid, acetic acid, and water and by rinsing the treated multi-component electrode with de-ionized water. Additional embodiments of broader and narrower scope are contemplated.
摘要翻译： 提供了一种用于再生多组分电极的方法，其包括结合到导电背板的硅电极。 该方法包括：（i）通过将多组分电极浸入含有硫酸，过氧化氢和水的基本上不含醇的DSP溶液中并从而从多组分电极中除去金属离子，并用去离子水冲洗多组分电极， 电离水; （ii）在从其去除金属离子之后抛光多组分电极的一个或多个表面; 和（iii）通过用包含氢氟酸，硝酸，乙酸和水的混合酸溶液处理抛光的多组分电极，并通过用处理过的多组分电极进行漂洗来处理多组分电极的硅表面的污染物 去离子水。 考虑到更广泛和更窄范围的另外的实施例。
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公开(公告)号：USRE42495E1
公开(公告)日：2011-06-28
申请号：US12700241
申请日：2010-02-04
IPC分类号： G08B13/00
CPC分类号： G08B5/38 , G08B13/19 , G08B13/1963 , G08B13/19643 , G08B13/19652
摘要： An intruder detection and warning system has a plurality of infrared sensors for receiving infrared radiation from respective contiguous areas of premises in need of security. A central illumination unit including a rotatable light is operated to project a beam illuminating a selected one of the contiguous areas of the premises in response to the received infrared radiation by the infrared sensor in the selected area indicating presence of a person in the selected area. Initially a polite message randomly selected from a group of different polite messages is broadcast to request the intruder to leave the premises. When continued presence of the intruder is detected, the light beam is moved away from and then back to the selected area and a further message randomly selected from a group of different more demanding messages is broadcast to demand the intruder to leave the premises. Thus computerized control of the central illumination unit to selectively illuminate areas monitored by respective infrared sensors to detect intruders mimics manual monitoring and security enforcement to more effectively deter intruders. Control of the illumination unit with an associated video camera is passed to a remote monitoring station upon continued failure of the intruder to vacate the premises.
摘要翻译： 入侵者检测和警报系统具有多个红外传感器，用于从房屋的各个区域接收信号。 包括可旋转光的中央照明单元响应于从传感器接收的信号来投射光束以照亮房屋的选定区域，指示该区域中的人的存在。 最初，从一组不同礼貌消息中随机选择的礼貌消息要求入侵者离开。 当检测到入侵者的持续存在时，光束被移动离开并且然后返回到相同的区域，并且进一步，更苛刻的消息被广播以要求入侵者离开房屋。 因此，中央照明单元的计算机化控制模拟手动监控，以更有效地阻止入侵者。
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10.发明申请公开(公告)号：US20090321018A1
公开(公告)日：2009-12-31
申请号：US12164288
申请日：2008-06-30
申请人： Jason Augustino , Armen Avoyan , Yan Fang , Duane Outka , Hong Shih , Stephen Whitten
发明人： Jason Augustino , Armen Avoyan , Yan Fang , Duane Outka , Hong Shih , Stephen Whitten
CPC分类号： H01J37/32541 , H01J37/32009 , H01J37/32605 , H01L21/67069
摘要： In accordance with one embodiment of the present disclosure, an assembly is provided comprising a multi-component electrode and a peripherally engaging electrode carrier. The peripherally engaging electrode carrier comprises a carrier frame and a plurality of reciprocating electrode supports. The multi-component electrode is positioned in the electrode accommodating aperture of the carrier frame. The backing plate of the electrode comprises a plurality of mounting recesses formed about its periphery. The reciprocating electrode supports can be reciprocated into and out of the mounting recesses. Additional embodiments of broader and narrower scope are contemplated.
摘要翻译： 根据本公开的一个实施例，提供了包括多组分电极和外围接合电极载体的组件。 外周接合电极载体包括载体框架和多个往复电极支撑件。 多组分电极位于载体框架的电极容纳孔中。 电极的背板包括围绕其周边形成的多个安装凹部。 往复式电极支撑件可以往复运动进入和离开安装凹槽。 考虑到更广泛和更窄范围的另外的实施例。
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