Invention Grant
US08193468B2 Methods and systems for precisely relatively positioning a waist of a pulsed laser beam and method and system for controlling energy delivered to a target structure
有权
用于精确地相对定位脉冲激光束的腰部的方法和系统，以及用于控制传送到目标结构的能量的方法和系统
- Patent Title: Methods and systems for precisely relatively positioning a waist of a pulsed laser beam and method and system for controlling energy delivered to a target structure
- Patent Title (中): 用于精确地相对定位脉冲激光束的腰部的方法和系统，以及用于控制传送到目标结构的能量的方法和系统
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Application No.: US11247541Application Date: 2005-10-11
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Publication No.: US08193468B2Publication Date: 2012-06-05
- Inventor: James J. Cordingley , Joseph J. Griffiths , Donald V. Smart
- Applicant: James J. Cordingley , Joseph J. Griffiths , Donald V. Smart
- Applicant Address: US MA Bedford
- Assignee: GSI Group Corporation
- Current Assignee: GSI Group Corporation
- Current Assignee Address: US MA Bedford
- Agency: Knobbe Martens Olson & Bear LLP
- Main IPC: B23K26/00
- IPC: B23K26/00
Abstract:
A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includes providing information based on a model of laser pulse interactions with the predetermined microstructure, the substrate and the other structures. At least one characteristic of at least one pulse is determined based on the information. A pulsed laser beam is generated including the at least one pulse. The method further includes irradiating the at least one pulse having the at least one determined characteristic into a spot on the predetermined microstructure. The at least one determined characteristic and other characteristics of the at least one pulse are sufficient to locally process the predetermined microstructure without causing the undesirable changes.
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