发明授权
US08198133B2 Structures and methods to improve lead-free C4 interconnect reliability
有权
提高无铅C4互连可靠性的结构和方法
- 专利标题: Structures and methods to improve lead-free C4 interconnect reliability
- 专利标题(中): 提高无铅C4互连可靠性的结构和方法
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申请号: US12458441申请日: 2009-07-13
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公开(公告)号: US08198133B2公开(公告)日: 2012-06-12
- 发明人: Timothy H. Daubenspeck , Paul Fortier , Jeffrey P. Gambino , Christopher D. Muzzy , David L. Questad , Wolfgang Sauter , Timothy D. Sullivan
- 申请人: Timothy H. Daubenspeck , Paul Fortier , Jeffrey P. Gambino , Christopher D. Muzzy , David L. Questad , Wolfgang Sauter , Timothy D. Sullivan
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Roberts Mlotkowski Safran & Cole, P.C.
- 代理商 Richard Kotulak
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
Controlled collapse chip connection (C4) structures and methods of manufacture, and more specifically to structures and methods to improve lead-free C4 interconnect reliability. A structure includes a ball limited metallization (BLM) layer and a controlled collapse chip connection (C4) solder ball formed on the BLM layer. Additionally, the structure includes a final metal pad layer beneath the BLM layer and a cap layer beneath the final metal pad layer. Furthermore, the structure includes an air gap formed beneath the C4 solder ball between the final metal pad layer and one of the BLM layer and the cap layer.
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