发明授权
- 专利标题: Pressure sensor
- 专利标题(中): 压力传感器
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申请号: US12569939申请日: 2009-09-30
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公开(公告)号: US08272256B2公开(公告)日: 2012-09-25
- 发明人: Takashi Mori , Takuya Mizuno , Toshiyuki Matsuoka , Yoshinori Tsujimura , Takio Kojima , Yuzo Higuchi
- 申请人: Takashi Mori , Takuya Mizuno , Toshiyuki Matsuoka , Yoshinori Tsujimura , Takio Kojima , Yuzo Higuchi
- 申请人地址: JP Aichi
- 专利权人: NGK Spark Plug Co., Ltd.
- 当前专利权人: NGK Spark Plug Co., Ltd.
- 当前专利权人地址: JP Aichi
- 代理机构: Sughrue Mion, PLLC
- 优先权: JP2008-252244 20080930; JP2009-019789 20090130; JP2009-019802 20090130; JP2009-215982 20090917
- 主分类号: G01M15/08
- IPC分类号: G01M15/08
摘要:
A pressure sensor has a Si device having a first main surface that has a bonded area, a second main surface parallel to the first main surface, a pressure-sensitive resistor formed on the first main surface, and a joining assist pattern formed on the first main surface, and a pressing member bonded to the bonded area on the first main surface and compressing the Si device in a thickness direction. The pressure-sensitive resistor has a first bonded section which is placed within the bonded area of the first main surface and is bonded to the pressing member. The joining assist pattern has a second bonded section which is made of the same material as the first bonded section of the pressure-sensitive resistor and is placed within the bonded area of the first main surface and is bonded to the pressing member.
公开/授权文献
- US20100077844A1 PRESSURE SENSOR 公开/授权日:2010-04-01