Pressure sensor
    1.
    发明授权
    Pressure sensor 有权
    压力传感器

    公开(公告)号:US08272256B2

    公开(公告)日:2012-09-25

    申请号:US12569939

    申请日:2009-09-30

    IPC分类号: G01M15/08

    摘要: A pressure sensor has a Si device having a first main surface that has a bonded area, a second main surface parallel to the first main surface, a pressure-sensitive resistor formed on the first main surface, and a joining assist pattern formed on the first main surface, and a pressing member bonded to the bonded area on the first main surface and compressing the Si device in a thickness direction. The pressure-sensitive resistor has a first bonded section which is placed within the bonded area of the first main surface and is bonded to the pressing member. The joining assist pattern has a second bonded section which is made of the same material as the first bonded section of the pressure-sensitive resistor and is placed within the bonded area of the first main surface and is bonded to the pressing member.

    摘要翻译: 压力传感器具有Si器件,其具有第一主表面,具有接合区域,平行于第一主表面的第二主表面,形成在第一主表面上的压敏电阻器,以及形成在第一主表面上的接合辅助图案 主表面和与第一主表面上的接合区域接合并且沿厚度方向压缩Si器件的按压部件。 压敏电阻器具有第一接合部,该第一接合部位于第一主面的接合区域内并且接合到按压部件。 接合辅助图案具有第二接合部,该第二接合部由与压敏电阻器的第一接合部相同的材料制成,并且被放置在第一主表面的接合区域内并且接合到按压部件。

    Pressure detection apparatus
    2.
    发明授权
    Pressure detection apparatus 有权
    压力检测装置

    公开(公告)号:US08410801B2

    公开(公告)日:2013-04-02

    申请号:US12569976

    申请日:2009-09-30

    IPC分类号: G01R27/08

    CPC分类号: G01L23/18 G01L9/065 G01L23/22

    摘要: A pressure detection apparatus has a pressure-sensitive resistor whose first resistance varies according to pressure and a change of its own temperature, a temperature-sensitive resistor which has a same resistance-temperature coefficient as the pressure-sensitive resistor and whose second resistance varies according to the change of the temperature, a current source supplying first and second constant-currents to the pressure-sensitive and temperature-sensitive resistors respectively, and a pressure signal generation output section. The current source adjusts the first and second constant-currents so that when the pressure is an initial pressure, a reference first voltage appearing across the pressure-sensitive resistor and a reference second voltage appearing across the temperature-sensitive resistor become equal to each other. The pressure signal generation output section outputs a first voltage signal corresponding to the pressure on the basis of a difference voltage between a first voltage of the pressure-sensitive resistor and a second voltage of the temperature-sensitive resistor.

    摘要翻译: 压力检测装置具有压敏电阻器,其第一电阻根据压力和其自身温度的变化而变化,温度敏感电阻器具有与压敏电阻器相同的电阻温度系数,并且其第二电阻根据 对于温度的变化,分别向压敏电阻器和温度敏感电阻器提供第一和第二恒定电流的电流源以及压力信号产生输出部分。 电流源调节第一和第二恒定电流,使得当压力为初始压力时,跨压敏电阻器出现的参考第一电压和跨过温度敏感电阻器出现的基准第二电压变得彼此相等。 压力信号生成输出部根据压敏电阻的第一电压与感温电阻的第二电压之间的差分电压,输出与压力对应的第一电压信号。

    Mass flow sensor and mass flowmeter comprising the same
    3.
    发明授权
    Mass flow sensor and mass flowmeter comprising the same 失效
    包括其的质量流量传感器和质量流量计

    公开(公告)号:US06805003B2

    公开(公告)日:2004-10-19

    申请号:US09962346

    申请日:2001-09-26

    IPC分类号: G01F168

    CPC分类号: G01F1/6845

    摘要: A mass flow sensor includes a semiconductor substrate 1, an insulating thin film 2, heaters 311 and 312, temperature measurement resistors 321 and 322, and a protective layer 4. The heaters 311 and 312 are formed on the surface of the insulating thin film 2, and are provided adjacently such that the heater 311 is provided upstream the heater 312 and the heater 312 is provided downstream the heater 311. A cavity 5 is formed below the heaters 311 and 312, and the heaters are thermally insulated from the remaining portion of the semiconductor substrate. The temperature measurement resistors 321 and 322 are formed on the top surface of the insulating thin film 2, and are provided at opposite sides of the heaters 311 and 312, such that the resistors are aligned with respect to the flow passage of a fluid. In the mass flow sensor and the mass flowmeter including the sensor, the flow rate and flow direction of a fluid can be detected by means of merely the heaters 311 and 312, which are active elements. Therefore, the sensor and the flowmeter exhibits high-speed response with respect to change in the flow rate of the fluid.

    摘要翻译: 质量流量传感器包括半导体衬底1,绝缘薄膜2,加热器311和312,温度测量电阻321和322以及保护层4.加热器311和312形成在绝缘薄膜2的表面上 并且相邻地设置,使得加热器311设置在加热器312的上游,并且加热器312设置在加热器311的下游。空腔5形成在加热器311和312的下方,并且加热器与剩余部分 半导体衬底。 温度测量电阻器321和322形成在绝缘薄膜2的顶表面上,并且设置在加热器311和312的相对侧,使得电阻器相对于流体的流动通道对准。 在包括传感器的质量流量传感器和质量流量计中,流体的流速和流动方向可以仅通过作为有源元件的加热器311和312来检测。 因此,传感器和流量计相对于流体的流量变化表现出高速响应。

    GAS SENSOR
    4.
    发明申请
    GAS SENSOR 有权
    气体传感器

    公开(公告)号:US20100147685A1

    公开(公告)日:2010-06-17

    申请号:US12527824

    申请日:2008-12-12

    IPC分类号: G01N27/26

    CPC分类号: G01N27/128

    摘要: Between a gas sensing layer (4) and a base member (15) composed of a silicon substrate (2) and an insulating coat layer (3), there is formed an adhesion layer 7, to improve the adhesion therebetween, and to prevent separation. The gas sensing layer (4) and sensing electrodes (6) are electrically connected by abutment of a confronting surface (61) of sensing electrodes (6) confronting the gas sensing layer (4) and sides surfaces of the sensing electrodes on both sides, on the gas sensing layer (4), and accordingly the gas sensor properly senses an electric characteristic of the gas sensing layer (4) varied in accordance with a concentration variation of a specified gas. Furthermore, the sensing electrodes (6) are in contact with the gas sensing layer (4), but the sensing electrodes are not in contact with the adhesion layer (7). Therefore, the adhesion layer (7) need not be a complete insulating layer, and it is possible to use, as the adhesion layer, an incomplete insulating film or a conductive film, so that options of the adhesion layer (7) are increased.

    摘要翻译: 在气体感测层(4)和由硅衬底(2)和绝缘涂层(3)组成的基底构件(15)之间形成粘合层7,以改善它们之间的粘附性并防止分离 。 气体感测层(4)和感测电极(6)通过面对气体感测层(4)的感测电极(6)的相对表面(61)和两侧的感测电极的侧表面的邻接电连接, 在气体感测层(4)上,因此气体传感器适当地感测根据特定气体的浓度变化而变化的气体感测层(4)的电特性。 此外,感测电极(6)与气体感测层(4)接触,但感测电极不与粘附层(7)接触。 因此,粘合层(7)不需要是完整的绝缘层,并且可以使用不完全绝缘膜或导电膜作为粘合层,使得粘附层(7)的选项增加。

    Gas sensor
    5.
    发明授权
    Gas sensor 有权
    气体传感器

    公开(公告)号:US08393196B2

    公开(公告)日:2013-03-12

    申请号:US12527824

    申请日:2008-12-12

    IPC分类号: G01N7/00

    CPC分类号: G01N27/128

    摘要: Between a gas sensing layer (4) and a base member (15) composed of a silicon substrate (2) and an insulating coat layer (3), there is formed an adhesion layer 7, to improve the adhesion therebetween, and to prevent separation. The gas sensing layer (4) and sensing electrodes (6) are electrically connected by abutment of a confronting surface (61) of sensing electrodes (6) confronting the gas sensing layer (4) and sides surfaces of the sensing electrodes on both sides, on the gas sensing layer (4), and accordingly the gas sensor properly senses an electric characteristic of the gas sensing layer (4) varied in accordance with a concentration variation of a specified gas. Furthermore, the sensing electrodes (6) are in contact with the gas sensing layer (4), but the sensing electrodes are not in contact with the adhesion layer (7). Therefore, the adhesion layer (7) need not be a complete insulating layer, and it is possible to use, as the adhesion layer, an incomplete insulating film or a conductive film, so that options of the adhesion layer (7) are increased.

    摘要翻译: 在气体感测层(4)和由硅衬底(2)和绝缘涂层(3)组成的基底构件(15)之间形成粘合层7,以改善它们之间的粘附性并防止分离 。 气体感测层(4)和感测电极(6)通过面对气体感测层(4)的感测电极(6)的相对表面(61)和两侧的感测电极的侧表面的邻接电连接, 在气体感测层(4)上,因此气体传感器适当地感测根据特定气体的浓度变化而变化的气体感测层(4)的电特性。 此外,感测电极(6)与气体感测层(4)接触,但感测电极不与粘附层(7)接触。 因此,粘合层(7)不需要是完整的绝缘层,并且可以使用不完全绝缘膜或导电膜作为粘合层,使得粘附层(7)的选项增加。

    Micro-heater and sensor
    6.
    发明授权
    Micro-heater and sensor 有权
    微型加热器和传感器

    公开(公告)号:US07487675B2

    公开(公告)日:2009-02-10

    申请号:US11347306

    申请日:2006-02-06

    IPC分类号: G01F1/692

    摘要: A micro-heater including a semiconductor substrate having a cavity; an insulating layer provided on an upper side of the semiconductor substrate and closing the cavity; and a heater element embedded in a portion of the insulating layer above the cavity and including a metallic material. The insulating layer includes: a compressive stress film made of silicon oxide; and a tensile stress film made of silicon nitride. The tensile stress film has a thickness not less than that of the compressive stress film.

    摘要翻译: 一种微加热器,包括具有空腔的半导体衬底; 绝缘层,设置在所述半导体衬底的上侧并闭合所述腔; 以及加热器元件,其嵌入在所述空腔上方的绝缘层的一部分中并且包括金属材料。 绝缘层包括:由氧化硅制成的压应力膜; 和由氮化硅制成的拉伸应力膜。 拉伸应力膜的厚度不小于压缩应力膜的厚度。

    RELAY
    7.
    发明申请
    RELAY 审中-公开
    中继

    公开(公告)号:US20130214881A1

    公开(公告)日:2013-08-22

    申请号:US13882646

    申请日:2011-10-31

    IPC分类号: H01H33/18

    摘要: A relay includes a pair of fixed terminals arranged to respectively have fixed contacts, a movable contact member arranged to have a pair of movable contacts, a driving structure operated to move the movable contact member and a magnet arranged to extinguish an arc. The movable contact member has a center section located between the pair of movable contacts. The magnet is placed on at least one of a first side and a second side that face each other across a predetermined face including the movable contact member and the pair of fixed terminals electrically connected by the movable contact member. The magnet is arranged to have a magnitude relation that a center area where the center section is located has a lower magnetic flux density than movable contact portions where the pair of movable contacts are located.

    摘要翻译: 继电器包括:一对固定端子,分别具有固定触点;可动触头构件,其布置成具有一对可动触头;驱动结构,用于移动可动触头构件;以及磁铁,其布置成熄灭电弧。 可动接触构件具有位于该对可动触点之间的中心部分。 磁体被放置在包括可动接触构件和由可动接触构件电连接的一对固定端子的预定面上彼此面对的第一侧面和第二侧面中的至少一方。 磁体被布置成具有与中心部分所在的中心区域相比具有比可动接触件对可移动接点的位置更低的磁通密度的大小关系。

    Oxidizing gas sensor and production method thereof
    8.
    发明申请
    Oxidizing gas sensor and production method thereof 有权
    氧化气体传感器及其制造方法

    公开(公告)号:US20060196248A1

    公开(公告)日:2006-09-07

    申请号:US11359380

    申请日:2006-02-23

    IPC分类号: G01N7/00 G01N33/50 G08B17/10

    CPC分类号: G01N27/125

    摘要: There is provided an oxidizing gas sensor that includes an insulating substrate, a gas sensing layer laminated on the insulating substrate and substantially made of tin oxide so as to make resistance changes in response to concentration variations in oxidizing gas and a plurality of catalyst grains applied to a surface of the gas sensing layer and substantially made of gold, wherein 20% or more of the catalyst grains have an aspect ratio of 2.0 or greater when viewed at from the surface of the gas sensing layer.

    摘要翻译: 提供一种氧化气体传感器,其包括绝缘基板,层压在绝缘基板上并基本上由氧化锡制成的气体感测层,以便响应于氧化气体的浓度变化和施加到 气体感测层的表面,并且基本上由金制成,其中当从气体感测层的表面观察时,其中20%或更多的催化剂颗粒具有2.0或更大的纵横比。

    Ceramic and metal joining structure
    9.
    发明授权
    Ceramic and metal joining structure 失效
    陶瓷和金属接合结构

    公开(公告)号:US4984927A

    公开(公告)日:1991-01-15

    申请号:US312383

    申请日:1989-02-17

    摘要: Ceramic and metal shafts are joined at their ends by brazing, with a buffer member being interposed therebetween. The joined ends of the ceramic and metal shafts and the buffer member are received within a metal sleeve and joined by brazing to part of the inner circumferential wall of the metal sleeve in such a manner than an axial end of the joint where the inner circumferential wall is securely joined to the ceramic and metal shafts is positioned between opposite axial ends of the metal sleeve and at the same time between opposite axial ends of the ceramic shaft. The outer circumferential wall of the metal sleeve is formed with an annular groove in the place corresponding to the above mentioned axial end of the joint with respect to the axial direction of the metal sleeve.

    摘要翻译: 陶瓷和金属轴在其端部通过钎焊接合,缓冲构件插入其间。 陶瓷和金属轴和缓冲构件的接合端容纳在金属套筒内,并且以与接头的轴向端部不同的方式通过钎焊连接到金属套筒的内周壁的一部分,其中内周壁 被牢固地接合到陶瓷上,并且金属轴定位在金属套筒的相对的轴向端部之间并且同时位于陶瓷轴的相对的轴向端部之间。 金属套筒的外周壁相对于金属套筒的轴向在与接头的上述轴向端相对应的位置上形成有环形槽。

    Gas sensor
    10.
    发明授权
    Gas sensor 有权
    气体传感器

    公开(公告)号:US07712349B2

    公开(公告)日:2010-05-11

    申请号:US10581075

    申请日:2004-12-01

    IPC分类号: G01N9/00

    CPC分类号: G01N33/0009

    摘要: The object of the present invention is to provide a gas sensor in which a gas detection element is mounted on a wiring substrate; in which a protective cap having gas inlets formed therein is attached to the wiring substrate; and which has a structure capable of effectively preventing emanation of gas from the wiring substrate and the protective cap. A gas sensor comprises a gas detecting element on a writing board where a protective cap with air vents is mounted. The sensor effectively prevents a gas from emanating from the wiring board and the protective cap. The wiring board where a plurality of gas detecting elements (8,9) are to be mounted is formed of a ceramic wiring board (2) excellent in heat resistance. The protective cap (3) having air vents (31 to 39) is formed of a metal excellent in heat resistance. The metal protective cap (3) is fitted to the ceramic wiring board (2) instead of using adhesive. In this way a gas sensor (1) is manufactured. Adoption of such a structure enables suppression of the gas emission from the ceramic wiring board (2) and the metal protective cap (3) effectively during the manufacturing step or in use of the gas sensor (1) attached to a car, thereby preventing lowering of the gas detection accuracy or early deterioration of the gas detecting elements (8,9).

    摘要翻译: 本发明的目的是提供一种气体传感器,其中气体检测元件安装在布线基板上; 其中在其中形成有气体入口的保护盖附接到布线基板; 并且其具有能够有效地防止从布线基板和保护盖发出气体的结构。 气体传感器包括在书写板上的气体检测元件,其中安装有通气孔的保护盖。 该传感器有效地防止气体从布线板和保护盖发出。 要安装多个气体检测元件(8,9)的布线板由耐热性优异的陶瓷布线板(2)形成。 具有通风口(31〜39)的保护盖(3)由耐热性优异的金属形成。 金属保护盖(3)安装在陶瓷布线板(2)上,而不是使用粘合剂。 以这种方式制造气体传感器(1)。 采用这种结构能够在制造步骤期间有效地抑制来自陶瓷布线板(2)和金属保护盖(3)的气体排放或者使用安装在汽车上的气体传感器(1),从而防止降低 的气体检测精度或气体检测元件(8,9)的早期劣化。