发明授权
- 专利标题: Microwave plasma reactors
- 专利标题(中): 微波等离子体反应器
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申请号: US12456388申请日: 2009-06-16
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公开(公告)号: US08316797B2公开(公告)日: 2012-11-27
- 发明人: Jes Asmussen , Timothy Grotjohn , Donnie K. Reinhard , Thomas Schuelke , M. Kagan Yaran , Kadek W. Hemawan , Michael Becker , David King , Yajun Gu , Jing Lu
- 申请人: Jes Asmussen , Timothy Grotjohn , Donnie K. Reinhard , Thomas Schuelke , M. Kagan Yaran , Kadek W. Hemawan , Michael Becker , David King , Yajun Gu , Jing Lu
- 申请人地址: US MI East Lansing, Plymouth
- 专利权人: Board of Trustees of Michigan State University Fraunhofer USA
- 当前专利权人: Board of Trustees of Michigan State University Fraunhofer USA
- 当前专利权人地址: US MI East Lansing, Plymouth
- 代理机构: Dickinson Wright PLLC
- 主分类号: C23C16/00
- IPC分类号: C23C16/00 ; C23F1/00 ; H01L21/306
摘要:
New and improved microwave plasma assisted reactors, for example chemical vapor deposition (MPCVD) reactors, are disclosed. The disclosed microwave plasma assisted reactors operate at pressures ranging from about 10 Torr to about 760 Torr. The disclosed microwave plasma assisted reactors include a movable lower sliding short and/or a reduced diameter conductive stage in a coaxial cavity of a plasma chamber. For a particular application, the lower sliding short position and/or the conductive stage diameter can be variably selected such that, relative to conventional reactors, the reactors can be tuned to operate over larger substrate areas, operate at higher pressures, and discharge absorbed power densities with increased diamond synthesis rates (carats per hour) and increased deposition uniformity.
公开/授权文献
- US20100034984A1 Microwave plasma reactors 公开/授权日:2010-02-11
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