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US08338744B2 Condensing optical system, laser processing method and apparatus, and manufacturing method of brittle material blank 有权
冷凝光学系统，激光加工方法和装置以及脆性材料坯料的制造方法

Condensing optical system, laser processing method and apparatus, and manufacturing method of brittle material blank
Abstract:
A condensing optical system having a condensed light spot with a small size and a large focal depth without causing a problem of a decrease in intensity of the condensed light spot or discontinuity of an intensity distribution in front and rear areas of a focal position is provided. The condensing optical system that condenses a laser beam generated by a laser source at a predetermined focal length is designed to satisfy Expressions (a) to (d), thereby producing 3rd and 5th spherical aberrations: |Z8|≧0.1λ or |Z15|≧0.05λ,  (a) Z8/Z15≧3 or Z8/Z15
Abstract(Chinese):

提供了具有小尺寸和大焦深的聚光点的聚光光学系统，而不会引起聚焦光斑强度降低或焦点位置前后区域强度分布不连续性的问题。 将由激光源产生的激光束以预定焦距进行会聚的聚光光学系统设计为满足表达式（a）至（d），从而产生第三和第五球面像差：| Z8 |≥0.1λ或| Z15 | ≧0.05λ，（a）Z8 /Z15≥3或Z8 / Z15 <1，（b）| Z8 | <1.4λ，（c）| Z15 | <0.5λ，（d）其中λ是波长，Z8 是对应于三阶球面像差的波前像差的泽尼克条纹多项式的第八系数系数，Z15是对应于第五球面像差的波前像差的泽尼克条纹多项式的系数的第十五系数。

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