公开(公告)号：US08338744B2

公开(公告)日：2012-12-25

申请号：US12516336

申请日：2007-11-29

申请人： Kenichi Watatani ,  Keiji Fuse ,  Yutaka Kobayashi

发明人： Kenichi Watatani ,  Keiji Fuse ,  Yutaka Kobayashi

IPC分类号： B23K26/00 ,  G02B19/00

CPC分类号： G02B26/101 ,  B23K26/0648 ,  B23K26/0665 ,  B23K26/0821 ,  B23K26/38 ,  B23K26/40 ,  B23K2103/50 ,  B28D5/00

摘要： A condensing optical system having a condensed light spot with a small size and a large focal depth without causing a problem of a decrease in intensity of the condensed light spot or discontinuity of an intensity distribution in front and rear areas of a focal position is provided. The condensing optical system that condenses a laser beam generated by a laser source at a predetermined focal length is designed to satisfy Expressions (a) to (d), thereby producing 3rd and 5th spherical aberrations: |Z8|≧0.1λ or |Z15|≧0.05λ,  (a) Z8/Z15≧3 or Z8/Z15

摘要翻译： 提供了具有小尺寸和大焦深的聚光点的聚光光学系统，而不会引起聚焦光斑强度降低或焦点位置前后区域强度分布不连续性的问题。 将由激光源产生的激光束以预定焦距进行会聚的聚光光学系统设计为满足表达式（a）至（d），从而产生第三和第五球面像差：| Z8 |≥0.1λ或| Z15 | ≧0.05λ，（a）Z8 /Z15≥3或Z8 / Z15 <1，（b）| Z8 | <1.4λ，（c）| Z15 | <0.5λ，（d）其中λ是波长，Z8 是对应于三阶球面像差的波前像差的泽尼克条纹多项式的第八系数系数，Z15是对应于第五球面像差的波前像差的泽尼克条纹多项式的系数的第十五系数。

公开(公告)号：US20060109874A1

公开(公告)日：2006-05-25

申请号：US11260198

申请日：2005-10-28

申请人： Manabu Shiozaki ,  Keiji Fuse ,  Kenichi Watatani

发明人： Manabu Shiozaki ,  Keiji Fuse ,  Kenichi Watatani

IPC分类号： H01S3/10 ,  B23K26/00

CPC分类号： B23K26/0624 ,  B23K26/21 ,  B23K26/38 ,  B23K26/382 ,  B23K26/40 ,  B23K2101/40 ,  B23K2103/42 ,  B23K2103/50 ,  B23K2103/52 ,  B29C65/16 ,  B29C65/1603 ,  B29C65/1616

摘要： Ultrashort pulse laser processing bores, welds or cuts objects (work pieces) by converging ultrashort laser pulses by a lens on the objects (work pieces) positioned at the focus and heating small spots or narrow lines on the objects (work pieces). Shortage of a focal depth of the lens prevents the ultrashort pulse laser processing from positioning the object (a work piece) and forming a deep, constant-diameter cylindrical hole. Z-parameter is defined to be Z=2fcΔt/Δi2, where Δt is a FWHM pulse width of the ultrashort pulse laser, Δi is a FWHM beam diameter of the ultrashort pulse, f is a focal length of the lens and c is the light velocity in vacuum. Selection of an optical system including a diffraction-type lens which gives the Z-parameter less than 1 (Z

摘要翻译： 超短脉冲激光加工孔，焊缝或切割物体（工件），通过镜头将超短激光脉冲聚焦在位于焦点上的物体（工件）上并加热物体（工件）上的小点或窄线。 透镜的焦深不足防止超短脉冲激光加工定位物体（工件）并形成深而恒定直径的圆柱形孔。 Z参数定义为Z = 2fcDeltat / Deltai <2>，其中Deltat是超短脉冲激光器的FWHM脉冲宽度，Deltai是超短脉冲的FWHM光束直径，f是焦距 的透镜，c是真空中的光速。 选择给出Z参数小于1（Z <1）的衍射型透镜的光学系统延长了焦深。 焦距深度的扩大有助于物体（工件）的定位，并且使得超短脉冲激光装置能够钻出深而恒定直径的圆柱形孔。

公开(公告)号：US07807942B2

公开(公告)日：2010-10-05

申请号：US11260198

申请日：2005-10-28

申请人： Manabu Shiozaki ,  Keiji Fuse ,  Kenichi Watatani

发明人： Manabu Shiozaki ,  Keiji Fuse ,  Kenichi Watatani

IPC分类号： B23K26/38

CPC分类号： B23K26/0624 ,  B23K26/21 ,  B23K26/38 ,  B23K26/382 ,  B23K26/40 ,  B23K2101/40 ,  B23K2103/42 ,  B23K2103/50 ,  B23K2103/52 ,  B29C65/16 ,  B29C65/1603 ,  B29C65/1616

摘要： Ultrashort pulse laser processing bores, welds or cuts objects (work pieces) by converging ultrashort laser pulses by a lens on the objects (work pieces) positioned at the focus and heating small spots or narrow lines on the objects (work pieces). Shortage of a focal depth of the lens prevents the ultrashort pulse laser processing from positioning the object (a work piece) and forming a deep, constant-diameter cylindrical hole. Z-parameter is defined to be Z=2fcΔt/Δi2, where Δt is a FWHM pulse width of the ultrashort pulse laser, Δi is a FWHM beam diameter of the ultrashort pulse, f is a focal length of the lens and c is the light velocity in vacuum. Selection of an optical system including a diffraction-type lens which gives the Z-parameter less than 1 (Z

摘要翻译： 超短脉冲激光加工孔，焊缝或切割物体（工件），通过镜头将超短激光脉冲聚焦在位于焦点上的物体（工件）上并加热物体（工件）上的小点或窄线。 透镜的焦深不足防止超短脉冲激光加工定位物体（工件）并形成深而恒定直径的圆柱形孔。 Z参数定义为Z = 2fc＆Dgr; t /＆Dgr; i2，其中＆Dgr; t是超短脉冲激光器的FWHM脉冲宽度，Dgr; i是超短脉冲的FWHM光束直径，f是焦距 的透镜，c是真空中的光速。 选择给出Z参数小于1（Z <1）的衍射型透镜的光学系统延长了焦深。 焦距深度的扩大有助于物体（工件）的定位，并且使得超短脉冲激光装置能够钻出深而恒定直径的圆柱形孔。

公开(公告)号：US20100065537A1

公开(公告)日：2010-03-18

申请号：US12516336

申请日：2007-11-29

申请人： Kenichi Watatani ,  Keiji Fuse ,  Yutaka Kobayashi

发明人： Kenichi Watatani ,  Keiji Fuse ,  Yutaka Kobayashi

IPC分类号： B23K26/00 ,  G02B19/00

CPC分类号： G02B26/101 ,  B23K26/0648 ,  B23K26/0665 ,  B23K26/0821 ,  B23K26/38 ,  B23K26/40 ,  B23K2103/50 ,  B28D5/00

摘要： A condensing optical system having a condensed light spot with a small size and a large focal depth without causing a problem of a decrease in intensity of the condensed light spot or discontinuity of an intensity distribution in front and rear areas of a focal position is provided. The condensing optical system that condenses a laser beam generated by a laser source at a predetermined focal length is designed to satisfy Expressions (a) to (d), thereby producing 3rd and 5th spherical aberrations: |Z8|≧0.1λ or |Z15|≧0.05λ,   (a) Z8/Z15≧3 or Z8/Z15

摘要翻译： 提供了具有小尺寸和大焦深的聚光点的聚光光学系统，而不会引起聚焦光斑强度降低或焦点位置前后区域强度分布不连续性的问题。 将由激光源产生的激光束以预定焦距进行会聚的聚光光学系统设计为满足表达式（a）至（d），从而产生第三和第五球面像差：| Z8 |≥0.1λ或| Z15 | ≧0.05λ，（a）Z8 /Z15≥3或Z8 / Z15 <1，（b）| Z8 | <1.4λ，（c）| Z15 | <0.5λ，（d）其中λ是波长，Z8 是对应于三阶球面像差的波前像差的泽尼克条纹多项式的第八系数系数，Z15是对应于第五球面像差的波前像差的泽尼克条纹多项式的系数的第十五系数。

公开(公告)号：US20090152246A1

公开(公告)日：2009-06-18

申请号：US11885459

申请日：2006-02-23

申请人： Hidehiko Mishima ,  Yasuhito Masuda ,  Yasuhiro Okuda ,  Kenichi Watatani ,  Shuji Sakabe ,  Masaki Hashida ,  Seiji Shimizu

发明人： Hidehiko Mishima ,  Yasuhito Masuda ,  Yasuhiro Okuda ,  Kenichi Watatani ,  Shuji Sakabe ,  Masaki Hashida ,  Seiji Shimizu

IPC分类号： B23K26/38

CPC分类号： B23K26/0624 ,  B23K2103/42 ,  B23K2103/50

摘要： In order to easily control the laser pulse width and perform high-precision processing, the method for processing a material by laser ablation according to the present invention is characterized in that the material having a region of which a double logarithmic chart shows a linearly-shaped line with a gradient of not more than 0.5, when a relationship between laser pulse width and ablation threshold is represented in the logarithmic chart with a laser pulse width in picosecond plotted along the horizontal axis and an ablation threshold in J/cm2 plotted along the vertical axis, is processed by the pulsed laser beam having the laser pulse width within the region.

摘要翻译： 为了容易地控制激光脉冲宽度并执行高精度处理，根据本发明的通过激光烧蚀处理材料的方法的特征在于，具有双对数图的区域的材料呈直线状 以激光脉冲宽度和消融阈值之间的关系在对数图中以沿着水平轴绘制的皮秒的激光脉冲宽度表示，并且以纵向绘制的消光阈值（J / cm 2）绘制在不大于0.5的梯度上 由具有该区域内的激光脉冲宽度的脉冲激光束进行处理。

公开(公告)号：US06745092B2

公开(公告)日：2004-06-01

申请号：US10181269

申请日：2002-07-16

申请人： Koichi Nakajima ,  Noriyuki Yajima ,  Kenichi Watatani

发明人： Koichi Nakajima ,  Noriyuki Yajima ,  Kenichi Watatani

IPC分类号： G06F1900

CPC分类号： G06Q10/06 ,  C23C14/3407

摘要： The product management system for sputtering targets is configured between a target manufacturer and target customers via a computer network. The customer and the manufacturer share the various information relating to the product management, such as hysteresis information of the backing plates, product information of the sputtering targets, use information of the sputtering targets, or the like with each other.

摘要翻译： 用于溅射靶的产品管理系统通过计算机网络配置在目标制造商和目标客户之间。 客户和制造商分享与产品管理有关的各种信息，例如背板的滞后信息，溅射靶的产品信息，溅射靶的使用信息等。