Invention Grant
- Patent Title: Drive loop for MEMS oscillator
- Patent Title (中): MEMS振荡器的驱动环路
-
Application No.: US12782064Application Date: 2010-05-18
-
Publication No.: US08378756B2Publication Date: 2013-02-19
- Inventor: Ming-Chieh Huang , Chiang Pu , Chan-Hong Chern , Chih-Chang Lin , Yuwen Swei
- Applicant: Ming-Chieh Huang , Chiang Pu , Chan-Hong Chern , Chih-Chang Lin , Yuwen Swei
- Applicant Address: TW
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW
- Agency: Lowe Hauptman Ham & Berner, LLP
- Main IPC: H03B5/30
- IPC: H03B5/30 ; G01C19/00
Abstract:
Some embodiments regard a method comprising: generating a current according to a movement of the MEMS device; the movement is controlled by a control signal; generating a peak voltage according to the current; and adjusting the control signal when the peak voltage is out of a predetermined range.
Public/Granted literature
- US20110285445A1 DRIVE LOOP FOR MEMS OSCILLATOR Public/Granted day:2011-11-24
Information query
