发明授权
- 专利标题: Floating body field-effect transistors, and methods of forming floating body field-effect transistors
- 专利标题(中): 浮体场效应晶体管,以及形成浮体场效应晶体管的方法
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申请号: US13088531申请日: 2011-04-18
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公开(公告)号: US08395214B2公开(公告)日: 2013-03-12
- 发明人: Jun Liu , Di Li , Michael P. Violette , Chandra Mouli , Howard Kirsch
- 申请人: Jun Liu , Di Li , Michael P. Violette , Chandra Mouli , Howard Kirsch
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Wells St. John, P.S.
- 主分类号: H01L27/01
- IPC分类号: H01L27/01 ; H01L27/12 ; H01L31/0392 ; H01L23/02
摘要:
In one embodiment, a floating body field-effect transistor includes a pair of source/drain regions having a floating body channel region received therebetween. The source/drain regions and the floating body channel region are received over an insulator. A gate electrode is proximate the floating body channel region. A gate dielectric is received between the gate electrode and the floating body channel region. The floating body channel region has a semiconductor SixGe(1-x)-comprising region. The floating body channel region has a semiconductor silicon-comprising region received between the semiconductor SixGe(1-x)-comprising region and the gate dielectric. The semiconductor SixGe(1-x)-comprising region has greater quantity of Ge than any quantity of Ge within the semiconductor silicon-comprising region. Other embodiments are contemplated, including methods of forming floating body field-effect transistors.
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