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US08431291B2 Intensity selective exposure photomask 有权
强度选择性曝光光掩模

Intensity selective exposure photomask
Abstract:
An intensity selective exposure photomask, also describes as a gradated photomask, is provided. The photomask includes a first region including a first array of sub-resolution features. The first region blocks a first percentage of the incident radiation. The photomask also includes a second region including a second array of sub-resolution features. The second region blocks a second percentage of the incident radiation different that the first percentage.
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