Invention Grant
- Patent Title: Ferro-electric capacitor modules, methods of manufacture and design structures
- Patent Title (中): 铁电电容器模块,制造方法和设计结构
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Application No.: US12823728Application Date: 2010-06-25
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Publication No.: US08450168B2Publication Date: 2013-05-28
- Inventor: Jeffrey P. Gambino , Matthew D. Moon , William J. Murphy , James S. Nakos , Paul W. Pastel , Brett A. Philips
- Applicant: Jeffrey P. Gambino , Matthew D. Moon , William J. Murphy , James S. Nakos , Paul W. Pastel , Brett A. Philips
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Michael J. Le Strange
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L29/76

Abstract:
Ferro-electric capacitor modules, methods of manufacture and design structures. The method of manufacturing the ferro-electric capacitor includes forming a barrier layer on an insulator layer of a CMOS structure. The method further includes forming a top plate and a bottom plate over the barrier layer. The method further includes forming a ferro-electric material between the top plate and the bottom plate. The method further includes encapsulating the barrier layer, top plate, bottom plate and ferro-electric material with an encapsulating material. The method further includes forming contacts to the top plate and bottom plate, through the encapsulating material. At least the contact to the top plate and a contact to a diffusion of the CMOS structure are in electrical connection through a common wire.
Public/Granted literature
- US20110316058A1 FERRO-ELECTRIC CAPACITOR MODULES, METHODS OF MANUFACTURE AND DESIGN STRUCTURES Public/Granted day:2011-12-29
Information query
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