- 专利标题: Resist composition for immersion exposure, method of forming resist pattern using the same, and fluorine-containing compound
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申请号: US13310625申请日: 2011-12-02
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公开(公告)号: US08501387B2公开(公告)日: 2013-08-06
- 发明人: Daiju Shiono , Takahiro Dazai , Sanae Furuya , Tomoyuki Hirano , Takayoshi Mori
- 申请人: Daiju Shiono , Takahiro Dazai , Sanae Furuya , Tomoyuki Hirano , Takayoshi Mori
- 申请人地址: JP Kawasaki-shi
- 专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人地址: JP Kawasaki-shi
- 代理机构: Knobbe Martens Olson & Bear LLP
- 优先权: JP2008-027045 20080206; JP2008-099826 20080407; JP2008-163862 20080623; JP2008-317487 20081212
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; G03F7/028 ; G03F7/033 ; G03F7/039 ; G03F7/26
摘要:
A resist composition for immersion exposure, including a base component that exhibits changed solubility in an alkali developing solution under action of acid, an acid generator component that generates acid upon exposure, and a fluorine-containing compound represented by a general formula (c-1) that is decomposable in an alkali developing solution: wherein R1 represents an organic group which may contain a polymerizable group, with the proviso that said polymerizable group has a carbon-carbon multiple bond, and the carbon atoms forming the multiple bond are not directly bonded to the carbon atom within the —C(═O)— group in general formula (c-1); and R2 represents an organic group having a fluorine atom.
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