Invention Grant
- Patent Title: Heat dissipation by through silicon plugs
- Patent Title (中): 通过硅插头散热
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Application No.: US12879584Application Date: 2010-09-10
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Publication No.: US08507940B2Publication Date: 2013-08-13
- Inventor: Chen-Hua Yu , Hung-Pin Chang , Yung-Chi Lin , Chia-Lin Yu , Jui-Pin Hung , Chien Ling Hwang
- Applicant: Chen-Hua Yu , Hung-Pin Chang , Yung-Chi Lin , Chia-Lin Yu , Jui-Pin Hung , Chien Ling Hwang
- Applicant Address: TW
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW
- Agency: Lowe Hauptman Ham & Berner, LLP
- Main IPC: H01L33/00
- IPC: H01L33/00

Abstract:
The package substrates with through silicon plugs (or vias) described above provide lateral and vertical heat dissipation pathways for semiconductor chips that require thermal management. Designs of through silicon plugs (TSPs) with high duty ratios can most effectively provide heat dissipation. TSP designs with patterns of double-sided combs can provide high duty ratios, such as equal to or greater than 50%. Package substrates with high duty ratios are useful for semiconductor chips that generate large amount of heat. An example of such semiconductor chip is a light-emitting diode (LED) chip.
Public/Granted literature
- US20110241061A1 HEAT DISSIPATION BY THROUGH SILICON PLUGS Public/Granted day:2011-10-06
Information query
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