Invention Grant
US08507971B2 Apparatus and method for a memory array with shallow trench isolation regions between bit lines for increased process margins 有权
用于存储器阵列的装置和方法,其在位线之间具有浅沟槽隔离区域,用于增加工艺余量

  • Patent Title: Apparatus and method for a memory array with shallow trench isolation regions between bit lines for increased process margins
  • Patent Title (中): 用于存储器阵列的装置和方法,其在位线之间具有浅沟槽隔离区域,用于增加工艺余量
  • Application No.: US12187276
    Application Date: 2008-08-06
  • Publication No.: US08507971B2
    Publication Date: 2013-08-13
  • Inventor: Satoshi Torii
  • Applicant: Satoshi Torii
  • Applicant Address: US CA Sunnyvale
  • Assignee: Spansion LLC
  • Current Assignee: Spansion LLC
  • Current Assignee Address: US CA Sunnyvale
  • Main IPC: H01L29/76
  • IPC: H01L29/76 H01L31/119
Apparatus and method for a memory array with shallow trench isolation regions between bit lines for increased process margins
Abstract:
The present invention provides an apparatus and method for a non-volatile memory comprising at least one array of memory cells with shallow trench isolation (STI) regions between bit lines for increased process margins. Specifically, in one embodiment, each of the memory cells in the array of memory cells includes a source, a control gate, and a drain, and is capable of storing at least one bit. The array of memory cells further includes word lines that are coupled to control gates of memory cells. The word lines are arranged in rows in the array. In addition, the array comprises bit lines coupled to source and drains of memory cells. The bit lines are arranged in columns in the array. Also, the array comprises at least one row of bit line contacts for providing electrical conductivity to the bit lines. Further, the array comprises shallow trench isolation (STI) regions separating each of the bit lines along the row of bit line contacts.
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