Invention Grant
US08514365B2 Lithographic apparatus and device manufacturing method 有权
平版印刷设备和器件制造方法

Abstract:
An immersion lithographic apparatus is described with a drain configured to remove liquid from a gap between an edge of the substrate and the substrate table on which the substrate is supported. The drain is provided with a means to provide liquid to the drain irrespective of the position of the substrate table and/or a means to saturate gas within the drain. Those measures reduce the variations in heat load due to evaporation of liquid in the drain.
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