Invention Grant
US08528498B2 Integrated steerability array arrangement for minimizing non-uniformity
有权
集成可控性阵列布置,用于最小化不均匀性
- Patent Title: Integrated steerability array arrangement for minimizing non-uniformity
- Patent Title (中): 集成可控性阵列布置,用于最小化不均匀性
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Application No.: US12145378Application Date: 2008-06-24
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Publication No.: US08528498B2Publication Date: 2013-09-10
- Inventor: Neil Benjamin
- Applicant: Neil Benjamin
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: IPSG, P.C. Intellectual Property Law
- Main IPC: C23C16/50
- IPC: C23C16/50 ; C23C16/503 ; C23C16/505 ; C23C16/509 ; C23C16/455 ; C23F1/00 ; H01L21/306 ; C23C16/06 ; C23C16/22

Abstract:
An integrated steerability array arrangement for managing plasma uniformity within a plasma processing environment to facilitate processing of a substrate is provided. The arrangement includes an array of electrical elements. The arrangement also includes an array of gas injectors, wherein the array of electrical elements and the array of gas injectors are arranged to create a plurality of plasma regions, each plasma region of the plurality of plasma regions being substantially similar. The arrangement further includes an array of pumps, wherein individual one of the array of pumps being interspersed among the array of electrical elements and the array of gas injectors. The array of pumps is configured to facilitate local removal of gas exhaust to maintain a uniform plasma region within the plasma processing environment.
Public/Granted literature
- US20090078677A1 INTEGRATED STEERABILITY ARRAY ARRANGEMENT FOR MINIMIZING NON-UNIFORMITY Public/Granted day:2009-03-26
Information query
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