Invention Grant
- Patent Title: Compositions for CMP of semiconductor materials
- Patent Title (中): 半导体材料CMP的组成
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Application No.: US12854470Application Date: 2010-08-11
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Publication No.: US08529680B2Publication Date: 2013-09-10
- Inventor: Francesco De Rege Thesauro , Steven Grumbine , Phillip Carter , Shoutian Li , Jian Zhang , David Schroeder , Ming-Shih Tsai
- Applicant: Francesco De Rege Thesauro , Steven Grumbine , Phillip Carter , Shoutian Li , Jian Zhang , David Schroeder , Ming-Shih Tsai
- Applicant Address: US IL Aurora
- Assignee: Cabot Microelectronics Corporation
- Current Assignee: Cabot Microelectronics Corporation
- Current Assignee Address: US IL Aurora
- Agent Thomas E Omholt; Steven D Weseman
- Main IPC: C09G1/02
- IPC: C09G1/02 ; B24D3/02 ; C09C1/68 ; C09K3/14

Abstract:
The invention provides a composition for chemical-mechanical polishing. The composition comprises an abrasive, a first metal rate polishing modifier agent, a second metal rate polishing modifier agent, and a liquid carrier. In one embodiment, the first metal rate polishing modifier agent has a standard reduction potential less than 0.34 V relative to a standard hydrogen electrode, and the second metal rate polishing modifier agent has a standard reduction potential greater than 0.34 V relative to a standard hydrogen electrode. In other embodiments, the first and second metal rate polishing modifier agents are different oxidizing agents.
Public/Granted literature
- US20100314576A1 COMPOSITIONS FOR CMP OF SEMICONDUCTOR MATERIALS Public/Granted day:2010-12-16
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