Invention Grant
- Patent Title: MRAM cell structure
- Patent Title (中): MRAM单元结构
-
Application No.: US13308065Application Date: 2011-11-30
-
Publication No.: US08558297B2Publication Date: 2013-10-15
- Inventor: Jhon Jhy Liaw , Yu-Jen Wang , Chia-Shiung Tsai
- Applicant: Jhon Jhy Liaw , Yu-Jen Wang , Chia-Shiung Tsai
- Applicant Address: TW
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW
- Agency: Baker & McKenzie LLP
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L21/4763

Abstract:
Disclosed herein is an improved memory device, and related methods of manufacturing, wherein the area occupied by a conventional landing pad is significantly reduced to around 50% to 10% of the area occupied by conventional landing pads. This is accomplished by removing the landing pad from the cell structure, and instead forming a conductive via structure that provides the electrical connection from the memory stack or device in the structure to an under-metal layer. By forming only this via structure, rather than separate vias formed on either side of a landing pad, the overall width occupied by the connective via structure from the memory stack to an under-metal layer is substantially reduced, and thus the via structure and under-metal layer may be formed closer to the memory stack (or conductors associated with the stack) so as to reduce the overall width of the cell structure.
Public/Granted literature
- US20120170358A1 MRAM cell structure Public/Granted day:2012-07-05
Information query
IPC分类: