Invention Grant
US08563417B2 Method for packaging ultra-thin chip with solder ball thermo-compression in wafer level packaging process
有权
用于在晶圆级封装工艺中封装具有焊球热压缩的超薄芯片的方法
- Patent Title: Method for packaging ultra-thin chip with solder ball thermo-compression in wafer level packaging process
- Patent Title (中): 用于在晶圆级封装工艺中封装具有焊球热压缩的超薄芯片的方法
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Application No.: US13302219Application Date: 2011-11-22
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Publication No.: US08563417B2Publication Date: 2013-10-22
- Inventor: Jun Lu , Alex Niu , Yueh-Se Ho , Ping Hoang , Jacky Gong , Yan Xun Xue , Xiaolian Zhang , Ming-Chen Lu
- Applicant: Jun Lu , Alex Niu , Yueh-Se Ho , Ping Hoang , Jacky Gong , Yan Xun Xue , Xiaolian Zhang , Ming-Chen Lu
- Applicant Address: US CA Sunnyvale
- Assignee: Alpha & Omega Semiconductor, Inc.
- Current Assignee: Alpha & Omega Semiconductor, Inc.
- Current Assignee Address: US CA Sunnyvale
- Agency: CHEmily LLC
- Agent Chein-Hwa Tsao
- Main IPC: H01L21/78
- IPC: H01L21/78

Abstract:
The invention generally relates to a packaging method of an ultra-thin chip, more specifically, the invention relates to a method for packaging the ultra-thin chip with solder ball thermo-compression in wafer level packaging process. The method starts with disposing solder balls on metal pads arranged on the front surface of semiconductor chips that are formed at the front surface of a semiconductor wafer. The solder balls are soften by heating the wafer, a compression plate is applied with a pressure on the top ends of the solder balls thus forming a co-planar top surface at the top ends of the solder balls. A molding compound is deposited on the front surface of the wafer with the top ends of the solder balls exposed. The wafer is then ground from its back surface to reduce its thickness to achieve ultra-thin chip.
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