公开(公告)号：US08563417B2

公开(公告)日：2013-10-22

申请号：US13302219

申请日：2011-11-22

申请人： Jun Lu ,  Alex Niu ,  Yueh-Se Ho ,  Ping Hoang ,  Jacky Gong ,  Yan Xun Xue ,  Xiaolian Zhang ,  Ming-Chen Lu

发明人： Jun Lu ,  Alex Niu ,  Yueh-Se Ho ,  Ping Hoang ,  Jacky Gong ,  Yan Xun Xue ,  Xiaolian Zhang ,  Ming-Chen Lu

IPC分类号： H01L21/78

CPC分类号： H01L21/561 ,  H01L21/566 ,  H01L21/568 ,  H01L23/3157 ,  H01L23/49524 ,  H01L23/49562 ,  H01L24/03 ,  H01L24/05 ,  H01L24/06 ,  H01L2224/03009 ,  H01L2224/0332 ,  H01L2224/0384 ,  H01L2224/03848 ,  H01L2224/03849 ,  H01L2224/04034 ,  H01L2224/05553 ,  H01L2224/05554 ,  H01L2224/05794 ,  H01L2224/058 ,  H01L2224/0603 ,  H01L2224/06051 ,  H01L2224/06135 ,  H01L2224/06164 ,  H01L2224/06181 ,  H01L2224/32245 ,  H01L2224/371 ,  H01L2224/40247 ,  H01L2224/73263 ,  H01L2224/84801 ,  H01L2224/94 ,  H01L2924/13091 ,  H01L2924/181 ,  H01L2224/03 ,  H01L2224/053 ,  H01L2924/014 ,  H01L2924/00

摘要： The invention generally relates to a packaging method of an ultra-thin chip, more specifically, the invention relates to a method for packaging the ultra-thin chip with solder ball thermo-compression in wafer level packaging process. The method starts with disposing solder balls on metal pads arranged on the front surface of semiconductor chips that are formed at the front surface of a semiconductor wafer. The solder balls are soften by heating the wafer, a compression plate is applied with a pressure on the top ends of the solder balls thus forming a co-planar top surface at the top ends of the solder balls. A molding compound is deposited on the front surface of the wafer with the top ends of the solder balls exposed. The wafer is then ground from its back surface to reduce its thickness to achieve ultra-thin chip.

摘要翻译： 本发明一般涉及超薄芯片的封装方法，更具体地说，本发明涉及一种用于在晶片级封装工艺中封装具有焊球热压缩的超薄芯片的方法。 该方法开始于将焊球设置在形成在半导体晶片的前表面的半导体芯片的前表面上的金属焊盘上。 通过加热晶片来软化焊球，压力板在焊球的顶端施加压力，从而在焊球的顶端形成共面顶表面。 模具化合物沉积在晶片的前表面上，其中焊球的顶端被暴露。 然后将晶片从其背面研磨以减小其厚度以实现超薄芯片。