发明授权
- 专利标题： Method of measuring a shape of an optical surface based on computationally combined surface region measurements and interferometric measuring device
- 专利标题（中）： 基于计算组合的表面区域测量和干涉测量装置测量光学表面的形状的方法
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申请号： US13417487申请日： 2012-03-12
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公开(公告)号： US08593642B2公开(公告)日： 2013-11-26
- 发明人: Rolf Freimann , Bernd Doerband , Stefan Schulte , Albrecht Hof , Frank Riepenhausen , Matthias Manger , Dietmar Neugebauer , Helmut Issler , Armin Bich
- 申请人： Rolf Freimann , Bernd Doerband , Stefan Schulte , Albrecht Hof , Frank Riepenhausen , Matthias Manger , Dietmar Neugebauer , Helmut Issler , Armin Bich
- 申请人地址： DE Oberkochen
- 专利权人： Carl Zeiss SMT GmbH
- 当前专利权人： Carl Zeiss SMT GmbH
- 当前专利权人地址： DE Oberkochen
- 代理机构： Sughrue Mion, PLLC
- 主分类号： G01B11/02
- IPC分类号： G01B11/02
摘要：
Measuring a shape of an optical surface (14) of a test object (12) includes: providing an interferometric measuring device (16) generating a measurement wave (18); arranging the measuring device (16) and the test object (12) consecutively at different measurement positions relative to each other, such that different regions (20) of the optical surface (14) are illuminated by the measurement wave (18); measuring positional coordinates of the measuring device (16) at the different measurement positions in relation to the test object (12); obtaining surface region measurements by interferometrically measuring the wavefront of the measurement wave (18) after interaction with the respective region (20) of the optical surface (14) using the measuring device (16) in each of the measurement positions; and determining the actual shape of the optical surface (14) by computationally combining the surface region measurements based on the measured positional coordinates of the measuring device (16) at each of the measurement positions.