公开(公告)号：US08269981B1

公开(公告)日：2012-09-18

申请号：US12414390

申请日：2009-03-30

申请人： Bernd Doerband ,  Frank Riepenhausen

发明人： Bernd Doerband ,  Frank Riepenhausen

IPC分类号： G01B11/02

CPC分类号： G01M11/025 ,  G01B9/02039 ,  G01B9/02057 ,  G01B9/02072 ,  G01B11/2441 ,  G01M11/0271 ,  G03F7/7055 ,  G03F7/706

摘要： A method of measuring a deviation of an optical test surface from a target shape is provided. The method includes directing an incoming beam of electromagnetic radiation onto the test surface to generate a measuring beam that has interacted with the test surface, causing the ray that has interacted with the test surface to pass through an interferometer on a deviated path, performing an interferometric measurement by superimposing a reference beam with the measuring beam to determine a wave front deviation of the measuring beam from the reference beam, determining a retrace error in the wave front deviation, and correcting the measured wave front deviation by eliminating the retrace error therefrom. The differences in aberrations accumulated by the ray having traveled on the deviated path from fictitious aberrations that would have been accumulated by a ray that had traveled on an undeviated path cause the retrace error.

摘要翻译： 提供了测量光学测试表面与目标形状的偏差的方法。 该方法包括将入射的电磁辐射束引导到测试表面上以产生与测试表面相互作用的测量光束，使得与测试表面相互作用的射线穿过偏斜路径上的干涉仪，执行干涉测量 通过用测量光束叠加参考光束来测量测量光束与参考光束的波前偏差，确定波前偏差中的回扫误差，以及通过消除测量波前偏差来校正测量的波前偏差。 由在已经在未变形路径上行进的光线积累的虚构像差的偏离路径上行进的光线所累积的像差的差异导致回扫误差。

公开(公告)号：US20120229814A1

公开(公告)日：2012-09-13

申请号：US13417487

申请日：2012-03-12

申请人： Rolf FREIMANN ,  Bernd BOERBAND ,  Stefan SCHULTE ,  Albrecht HOF ,  Frank RIEPENHAUSEN ,  Matthias MANGER ,  Dietmar NEUGEBAUER ,  Helmut ISSLER ,  Armin BICH

发明人： Rolf FREIMANN ,  Bernd BOERBAND ,  Stefan SCHULTE ,  Albrecht HOF ,  Frank RIEPENHAUSEN ,  Matthias MANGER ,  Dietmar NEUGEBAUER ,  Helmut ISSLER ,  Armin BICH

IPC分类号： G01B11/24 ,  G02B3/02

CPC分类号： G01B11/2441 ,  G01B9/02027 ,  G01B9/02039 ,  G01B9/02057 ,  G01B9/02072 ,  G01B2290/15 ,  G01M11/005 ,  G01M11/025 ,  G01M11/0271 ,  G02B3/02 ,  G02B5/10

摘要： Measuring a shape of an optical surface (14) of a test object (12) includes: providing an interferometric measuring device (16) generating a measurement wave (18); arranging the measuring device (16) and the test object (12) consecutively at different measurement positions relative to each other, such that different regions (20) of the optical surface (14) are illuminated by the measurement wave (18); measuring positional coordinates of the measuring device (16) at the different measurement positions in relation to the test object (12); obtaining surface region measurements by interferometrically measuring the wavefront of the measurement wave (18) after interaction with the respective region (20) of the optical surface (14) using the measuring device (16) in each of the measurement positions; and determining the actual shape of the optical surface (14) by computationally combining the sub-surface measurements based on the measured positional coordinates of the measuring device (16) at each of the measurement positions.

摘要翻译： 测量被测物体（12）的光学表面（14）的形状包括：提供产生测量波（18）的干涉测量装置（16）; 使测量装置（16）和测试对象（12）相对于彼此的不同测量位置连续布置，使得光学表面（14）的不同区域（20）被测量波（18）照亮; 测量所述测量装置（16）在与所述测试对象（12）相关的不同测量位置处的位置坐标; 通过在每个测量位置中使用测量装置（16）在与光学表面（14）的相应区域（20）相互作用之后干涉测量测量波（18）的波前来获得表面区域测量; 以及通过基于在每个测量位置处测量的测量装置（16）的测量的位置坐标计算地组合子表面测量来确定光学表面（14）的实际形状。

公开(公告)号：US08593642B2

公开(公告)日：2013-11-26

申请号：US13417487

申请日：2012-03-12

申请人： Rolf Freimann ,  Bernd Doerband ,  Stefan Schulte ,  Albrecht Hof ,  Frank Riepenhausen ,  Matthias Manger ,  Dietmar Neugebauer ,  Helmut Issler ,  Armin Bich

发明人： Rolf Freimann ,  Bernd Doerband ,  Stefan Schulte ,  Albrecht Hof ,  Frank Riepenhausen ,  Matthias Manger ,  Dietmar Neugebauer ,  Helmut Issler ,  Armin Bich

IPC分类号： G01B11/02

CPC分类号： G01B11/2441 ,  G01B9/02027 ,  G01B9/02039 ,  G01B9/02057 ,  G01B9/02072 ,  G01B2290/15 ,  G01M11/005 ,  G01M11/025 ,  G01M11/0271 ,  G02B3/02 ,  G02B5/10

摘要： Measuring a shape of an optical surface (14) of a test object (12) includes: providing an interferometric measuring device (16) generating a measurement wave (18); arranging the measuring device (16) and the test object (12) consecutively at different measurement positions relative to each other, such that different regions (20) of the optical surface (14) are illuminated by the measurement wave (18); measuring positional coordinates of the measuring device (16) at the different measurement positions in relation to the test object (12); obtaining surface region measurements by interferometrically measuring the wavefront of the measurement wave (18) after interaction with the respective region (20) of the optical surface (14) using the measuring device (16) in each of the measurement positions; and determining the actual shape of the optical surface (14) by computationally combining the surface region measurements based on the measured positional coordinates of the measuring device (16) at each of the measurement positions.

摘要翻译： 测量被测物体（12）的光学表面（14）的形状包括：提供产生测量波（18）的干涉测量装置（16）; 使测量装置（16）和测试对象（12）相对于彼此的不同测量位置连续布置，使得光学表面（14）的不同区域（20）被测量波（18）照亮; 测量所述测量装置（16）在与所述测试对象（12）相关的不同测量位置处的位置坐标; 通过在每个测量位置中使用测量装置（16）在与光学表面（14）的相应区域（20）相互作用之后干涉测量测量波（18）的波前来获得表面区域测量; 以及通过基于在每个测量位置处测量装置（16）的测量位置坐标计算地组合表面区域测量来确定光学表面（14）的实际形状。