发明授权
- 专利标题: Method of manufacturing semiconductor device
- 专利标题(中): 制造半导体器件的方法
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申请号: US13274367申请日: 2011-10-17
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公开(公告)号: US08609474B2公开(公告)日: 2013-12-17
- 发明人: Jong-Won Lim , Hokyun Ahn , Dong Min Kang , Woojin Chang , Hae Cheon Kim , Eun Soo Nam
- 申请人: Jong-Won Lim , Hokyun Ahn , Dong Min Kang , Woojin Chang , Hae Cheon Kim , Eun Soo Nam
- 申请人地址: KR Daejeon
- 专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人地址: KR Daejeon
- 代理机构: Rabin & Berdo, P.C.
- 优先权: KR10-2010-0127661 20101214
- 主分类号: H01L29/772
- IPC分类号: H01L29/772 ; H01L21/28 ; H01L29/423 ; H01L29/40
摘要:
Disclosed are a semiconductor device and a method of manufacturing the same. In the semiconductor device according to an exemplary embodiment of the present disclosure, at the time of forming a source electrode, a drain electrode, a field plate electrode, and a gate electrode on a substrate having a heterojunction structure such as AlGaN/GaN, the field plate electrode made of the same metal as the gate electrode is formed on the side surface of a second support part positioned below a head part of the gate electrode so as to prevent the gate electrode from collapsing and improve high-frequency and high-voltage characteristic of the semiconductor device.
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