Invention Grant
- Patent Title: Charged particle extraction device and method of design there for
- Patent Title (中): 带电粒子提取装置及其设计方法
-
Application No.: US13780071Application Date: 2013-02-28
-
Publication No.: US08653474B2Publication Date: 2014-02-18
- Inventor: Roderick Boswell , Orson Sutherland
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, PC
- Agent John B. Kelly; Michael O. Scheinberg
- Priority: AU2003905709 20031017
- Main IPC: G21K1/08
- IPC: G21K1/08 ; H01J3/14 ; H01J3/26 ; H01J49/42
Abstract:
The present invention provides a method for extracting a charged particle beam from a charged particle source. A set of electrodes is provided at the output of the source. The potentials applied to the electrodes produce a low-emittance growth beam with substantially zero electric field at the output of the electrodes.
Public/Granted literature
- US20130240751A1 Charged Particle Extraction Device and Method of Design There for Public/Granted day:2013-09-19
Information query
