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1.发明申请Magnetically Enhanced, Inductively coupled Plasma Source For a Focused Ion Beam System 审中-公开用于聚焦离子束系统的磁增强感应耦合等离子体源公开(公告)号：US20150130348A1
公开(公告)日：2015-05-14
申请号：US14481642
申请日：2014-09-09
Applicant: FEI Company
Inventor： John Keller , Noel Smith , Roderick Boswell , Lawrence Scipioni , Christine Charles , Orson Sutherland
CPC classification number: H01J37/32183 , H01J27/16 , H01J37/08 , H01J37/241 , H01J37/321 , H01J37/3211 , H01J37/32669 , H01J2237/0815
Abstract: The present invention provides an inductively coupled, magnetically enhanced ion beam source, suitable to be used in conjunction with probe-forming optics to produce an ion beam without kinetic energy oscillations induced by the source.
Abstract translation: 本发明提供了一种电感耦合磁增强型离子束源，适用于与探针形成光学器件结合使用以产生离子束而不产生由该源引起的动能振荡。
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公开(公告)号：US08653474B2
公开(公告)日：2014-02-18
申请号：US13780071
申请日：2013-02-28
Applicant: FEI Company
Inventor： Roderick Boswell , Orson Sutherland
CPC classification number: H01J3/00 , H01J27/024 , H01J37/08 , H01J2237/061 , H01J2237/083 , H01J2237/121 , H01J2237/31749
Abstract: The present invention provides a method for extracting a charged particle beam from a charged particle source. A set of electrodes is provided at the output of the source. The potentials applied to the electrodes produce a low-emittance growth beam with substantially zero electric field at the output of the electrodes.
Abstract translation: 本发明提供了一种从带电粒子源提取带电粒子束的方法。 在源的输出处提供一组电极。 施加到电极的电位产生在电极的输出处具有基本为零电场的低发射率增长光束。
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公开(公告)号：US20130240751A1
公开(公告)日：2013-09-19
申请号：US13780071
申请日：2013-02-28
Applicant: FEI COMPANY
Inventor： Roderick Boswell , Orson Sutherland
IPC: H01J3/00
CPC classification number: H01J3/00 , H01J27/024 , H01J37/08 , H01J2237/061 , H01J2237/083 , H01J2237/121 , H01J2237/31749
Abstract: The present invention provides a method for extracting a charged particle beam from a charged particle source. A set of electrodes is provided at the output of the source. The potentials applied to the electrodes produce a low-emittance growth beam with substantially zero electric field at the output of the electrodes.
Abstract translation: 本发明提供了一种从带电粒子源提取带电粒子束的方法。 在源的输出处提供一组电极。 施加到电极的电位产生在电极的输出处具有基本为零电场的低发射率增长光束。
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公开(公告)号：US09640367B2
公开(公告)日：2017-05-02
申请号：US14481642
申请日：2014-09-09
Applicant: FEI Company
Inventor： John Keller , Noel Smith , Roderick Boswell , Lawrence Scipioni , Christine Charles , Orson Sutherland
CPC classification number: H01J37/32183 , H01J27/16 , H01J37/08 , H01J37/241 , H01J37/321 , H01J37/3211 , H01J37/32669 , H01J2237/0815
Abstract: The present invention provides an inductively coupled, magnetically enhanced ion beam source, suitable to be used in conjunction with probe-forming optics to produce an ion beam without kinetic energy oscillations induced by the source.
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