Invention Grant
US08674416B2 Semiconductor device with reduced threshold variability having a threshold adjusting semiconductor alloy in the device active region
有权
具有降低的阈值变化性的半导体器件在器件有源区中具有阈值调节半导体合金
- Patent Title: Semiconductor device with reduced threshold variability having a threshold adjusting semiconductor alloy in the device active region
- Patent Title (中): 具有降低的阈值变化性的半导体器件在器件有源区中具有阈值调节半导体合金
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Application No.: US13663589Application Date: 2012-10-30
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Publication No.: US08674416B2Publication Date: 2014-03-18
- Inventor: Carsten Reichel , Thorsten Kammler , Annekathrin Zeun , Stephan Kronholz
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Priority: DE102009021486 20090515
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/94 ; H01L31/062 ; H01L31/113 ; H01L31/119

Abstract:
Generally, the subject matter disclosed herein is directed to semiconductor devices with reduced threshold variability having a threshold adjusting semiconductor material in the device active region. One illustrative semiconductor device disclosed herein includes an active region in a semiconductor layer of a semiconductor device substrate, the active region having a region length and a region width that are laterally delineated by an isolation structure. The semiconductor device further includes a threshold adjusting semiconductor alloy material layer that is positioned on the active region substantially without overlapping the isolation structure, the threshold adjusting semiconductor alloy material layer having a layer length that is less than the region length. Additionally, the disclosed semiconductor device includes a gate electrode structure that is positioned above the threshold adjusting semiconductor alloy material layer, the gate electrode structure including a high-k dielectric material and a metal-containing electrode material formed above the high-k dielectric material.
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