Invention Grant
US08692571B2 Apparatus and method for measuring degradation of CMOS VLSI elements
有权
用于测量CMOS VLSI元件退化的装置和方法
- Patent Title: Apparatus and method for measuring degradation of CMOS VLSI elements
- Patent Title (中): 用于测量CMOS VLSI元件退化的装置和方法
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Application No.: US13183521Application Date: 2011-07-15
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Publication No.: US08692571B2Publication Date: 2014-04-08
- Inventor: Fang-Shi Jordan Lai , Chih-Cheng Lu , Yung-Fu Lin , Hsu-Feng Hsueh , Chin-Hao Chang , Cheng Yen Weng , Manoj M. Mhala
- Applicant: Fang-Shi Jordan Lai , Chih-Cheng Lu , Yung-Fu Lin , Hsu-Feng Hsueh , Chin-Hao Chang , Cheng Yen Weng , Manoj M. Mhala
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Duane Morris LLP
- Main IPC: G01R31/00
- IPC: G01R31/00 ; G01R31/319

Abstract:
The reliability of an integrated circuit is inferred from the operational characteristics of sample metal oxide semiconductor (MOS) devices switchably coupled to drain/source bias and gate input voltages that are nominal, versus voltage and current conditions that elevate stress and cause temporary or permanent degradation, e.g., hot carrier injection (HCI), bias temperature instability (BTI, NBTI, PBTI), time dependent dielectric breakdown (TDDB). The MOS devices under test (preferably both PMOS and NMOS devices tested concurrently or in turn) are configured as current sources in the supply of power to a ring oscillator having cascaded inverter stages, thereby varying the oscillator frequency as a measure of the effects of stress on the devices under test, but without elevating the stress applied to the inverter stages.
Public/Granted literature
- US20130015876A1 APPARATUS AND METHOD FOR MEASURING DEGRADATION OF CMOS VLSI ELEMENTS Public/Granted day:2013-01-17
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