发明授权
- 专利标题: Discontinuous guard ring
- 专利标题(中): 不连续的护环
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申请号: US13437273申请日: 2012-04-02
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公开(公告)号: US08729664B2公开(公告)日: 2014-05-20
- 发明人: Jeffrey P. Gambino , Mark D. Jaffe , Mark D. Levy , John C. Malinowski
- 申请人: Jeffrey P. Gambino , Mark D. Jaffe , Mark D. Levy , John C. Malinowski
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 Nicholas L. Cadmus
- 主分类号: H01L29/15
- IPC分类号: H01L29/15 ; H01L23/52 ; H01L29/47 ; H01L27/095
摘要:
An integrated circuit chip comprising a guard ring formed on a semiconductor substrate that surrounds the active region of the integrated circuit chip and extends from the semiconductor substrate through one or more of a plurality of wiring levels. The guard ring comprises stacked metal lines with spaces breaking up each respective metal line. Each space may be formed such that it partially overlies the space in the metal line directly below but does not overlie any other space. Alternatively, each space may also be formed such that each space is at least completely overlying the space in the metal line below it.
公开/授权文献
- US20130256826A1 DISCONTINUOUS GUARD RING 公开/授权日:2013-10-03