发明授权
- 专利标题: Lateral light shield in backside illuminated imaging sensors
- 专利标题(中): 背面照明成像传感器的侧面防护罩
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申请号: US13370085申请日: 2012-02-09
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公开(公告)号: US08772898B2公开(公告)日: 2014-07-08
- 发明人: Duli Mao , Hsin-Chih Tai , Vincent Venezia , Yin Qian , Gang Chen , Howard E. Rhodes
- 申请人: Duli Mao , Hsin-Chih Tai , Vincent Venezia , Yin Qian , Gang Chen , Howard E. Rhodes
- 申请人地址: US CA Santa Clara
- 专利权人: OmniVision Technologies, Inc.
- 当前专利权人: OmniVision Technologies, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Blakely Sokoloff Taylor & Zafman LLP
- 主分类号: H01L31/0216
- IPC分类号: H01L31/0216
摘要:
A backside illuminated image sensor includes a semiconductor layer and a trench disposed in the semiconductor layer. The semiconductor layer has a frontside surface and a backside surface. The semiconductor layer includes a light sensing element of a pixel array disposed in a sensor array region of the semiconductor layer. The pixel array is positioned to receive external incoming light through the backside surface of the semiconductor layer. The semiconductor layer also includes a light emitting element disposed in a periphery circuit region of the semiconductor layer external to the sensor array region. The trench is disposed in the semiconductor layer between the light sensing element and the light emitting element. The trench is positioned to impede a light path between the light emitting element and the light sensing element when the light path is internal to the semiconductor layer.
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