发明授权
- 专利标题： Laser processing method
- 专利标题（中）： 激光加工方法
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申请号： US12907349申请日： 2010-10-19
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公开(公告)号： US08829391B2公开(公告)日： 2014-09-09
- 发明人: Kosuke Kurachi , Masahiko Kubota , Akihiko Okano , Atsushi Hiramoto
- 申请人： Kosuke Kurachi , Masahiko Kubota , Akihiko Okano , Atsushi Hiramoto
- 申请人地址： JP Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JP Tokyo
- 代理机构： Fitzpatrick, Cella, Harper & Scinto
- 优先权： JP2009-255897 20091109
- 主分类号： B23K26/42
- IPC分类号： B23K26/42 ; B23K26/40 ; B23K26/18 ; B23K26/36 ; H01L21/268 ; B23K26/00
摘要：
A laser processing method of processing an object to be processed. The object to be processed has a modified portion and a non-modified portion. A modified layer forming step forms a modified layer of the object to be processed by scanning an inner portion of the object with a condensing point of first laser light. The modified layer (i) has a processing speed with second laser light that is lower than a processing speed of a non-modified portion and (ii) is formed below the non-modified portion. A removing step removes a portion of the non-modified portion. The portion of the non-modified portion ranges from a surface of the object to the modified layer. The removing step includes irradiating the portion of the non-modified portion with the second laser light.
公开/授权文献
- US20110108532A1 LASER PROCESSING METHOD 公开/授权日：2011-05-12
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