Invention Grant
- Patent Title: Manufacturing method of non-volatile memory
- Patent Title (中): 非易失性存储器的制造方法
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Application No.: US14153897Application Date: 2014-01-13
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Publication No.: US08859364B2Publication Date: 2014-10-14
- Inventor: Shaw-Hung Ku , Chi-Pei Lu , Chun-Lien Su
- Applicant: MACRONIX International Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX International Co., Ltd.
- Current Assignee: MACRONIX International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: J.C. Patents
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/788 ; H01L29/51 ; H01L29/66 ; H01L21/28 ; H01L29/423

Abstract:
The present invention provides a manufacturing method of a non-volatile memory including forming a gate dielectric layer on a substrate; forming a floating gate on the gate dielectric layer; forming a first charge blocking layer on the floating gate; forming a nitride layer on the first charge blocking layer; forming a second charge blocking layer on the nitride layer; forming a control gate on the second charge blocking layer; and performing a treatment to the nitride layer to get a higher dielectric constant.
Public/Granted literature
- US20140127894A1 MANUFACTURING METHOD OF NON-VOLATILE MEMORY Public/Granted day:2014-05-08
Information query
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