Invention Grant
- Patent Title: Discrete polarization scatterometry
- Patent Title (中): 离散极化散射法
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Application No.: US13108892Application Date: 2011-05-16
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Publication No.: US08896832B2Publication Date: 2014-11-25
- Inventor: Andrew V. Hill , Amnon Manassen , Daniel Kandel , Vladimir Levinski , Joel Seligson , Alexander Svizher , David Y. Wang , Lawrence D. Rotter , Johannes D. de Veer
- Applicant: Andrew V. Hill , Amnon Manassen , Daniel Kandel , Vladimir Levinski , Joel Seligson , Alexander Svizher , David Y. Wang , Lawrence D. Rotter , Johannes D. de Veer
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corp.
- Current Assignee: KLA-Tencor Corp.
- Current Assignee Address: US CA Milpitas
- Agent Ann Marie Mewherter
- Main IPC: G01J4/00
- IPC: G01J4/00 ; G02B27/14 ; G01N21/47
Abstract:
Systems and methods for discrete polarization scatterometry are provided.
Public/Granted literature
- US20110310388A1 DISCRETE POLARIZATION SCATTEROMETRY Public/Granted day:2011-12-22
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