发明授权
- 专利标题： Thermally zoned substrate holder assembly
- 专利标题（中）： 热分区衬底支架组件
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申请号： US13307176申请日： 2011-11-30
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公开(公告)号： US08927907B2公开(公告)日： 2015-01-06
- 发明人: Steven T. Fink , Eric J. Strang
- 申请人： Steven T. Fink , Eric J. Strang
- 申请人地址： JP Tokyo
- 专利权人： Tokyo Electron Limited
- 当前专利权人： Tokyo Electron Limited
- 当前专利权人地址： JP Tokyo
- 代理机构： Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 主分类号： H05B3/02
- IPC分类号： H05B3/02 ; F25B21/02 ; H01L21/67
摘要：
A thermally zoned substrate holder including a substantially cylindrical base having top and bottom surfaces configured to support a substrate. A plurality of temperature control elements are disposed within the base. An insulator thermally separates the temperature control elements. The insulator is made from an insulting material having a lower coefficient of thermal conductivity than the base (e.g., a gas- or vacuum-filled chamber).
公开/授权文献
- US20120067866A1 THERMALLY ZONED SUBSTRATE HOLDER ASSEMBLY 公开/授权日：2012-03-22
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