公开(公告)号：US06960887B2

公开(公告)日：2005-11-01

申请号：US10359556

申请日：2003-02-07

Applicant: Eric J. Strang ,  Wayne L. Johnson ,  Robert G. Hostetler ,  Steven T. Fink

Inventor： Eric J. Strang ,  Wayne L. Johnson ,  Robert G. Hostetler ,  Steven T. Fink

IPC: H01J37/32 ,  H01J7/24 ,  H01L21/302 ,  H05B31/26

CPC classification number: H01J37/32449 ,  H01J37/32623 ,  H01J37/32834

Abstract: A plasma reactor or vacuum processing apparatus is provided with an orifice plate assembly. The orifice plate assembly includes an upper plate and a lower plate. Each plate is configured with through holes. The upper and lower orifice plates are independently rotatable with respect to each other. The plates are arranged within the vacuum chamber a discharge reactor such that the chuck assembly is disposed within an opening in the orifice plate assembly. The orifice plate assembly is further configured to have a perimeter shape that substantially matches the interior wall shape of vacuum chamber.

Abstract translation: 等离子体反应器或真空处理装置设置有孔板组件。 孔板组件包括上板和下板。 每个板配置有通孔。 上下孔板可独立地相对于彼此旋转。 板在真空室内布置有排放反应器，使得卡盘组件设置在孔板组件的开口内。 孔板组件进一步构造成具有与真空室的内壁形状基本匹配的周边形状。

公开(公告)号：US08927907B2

公开(公告)日：2015-01-06

申请号：US13307176

申请日：2011-11-30

Applicant: Steven T. Fink ,  Eric J. Strang

Inventor： Steven T. Fink ,  Eric J. Strang

IPC: H05B3/02 ,  F25B21/02 ,  H01L21/67

CPC classification number: H01L21/67103 ,  Y10T279/23

Abstract: A thermally zoned substrate holder including a substantially cylindrical base having top and bottom surfaces configured to support a substrate. A plurality of temperature control elements are disposed within the base. An insulator thermally separates the temperature control elements. The insulator is made from an insulting material having a lower coefficient of thermal conductivity than the base (e.g., a gas- or vacuum-filled chamber).

Abstract translation: 一种热分区衬底保持器，其包括基本上圆柱形的基部，其具有构造成支撑衬底的顶表面和底表面。 多个温度控制元件设置在基座内。 绝缘体将温度控制元件热分离。 绝缘体由具有比基底（例如，气体或真空填充的室）更低的导热系数的绝缘材料制成。

公开(公告)号：US07582186B2

公开(公告)日：2009-09-01

申请号：US10739127

申请日：2003-12-19

Applicant: Eric J. Strang ,  Steven T. Fink

Inventor： Eric J. Strang ,  Steven T. Fink

IPC: C23C16/00 ,  C23F1/00 ,  H01L21/306

CPC classification number: H01L21/67069 ,  H01J37/32642 ,  H01L21/68735

Abstract: A focus ring configured to be coupled to a substrate holder comprises a first surface exposed to a process; a second surface, opposite the first surface, for coupling to an upper surface of the substrate holder; an inner radial edge for facing a periphery of a substrate; and an outer radial edge. The second surface further comprises one or more contact features, each of which is configured to mate with one or more receiving features formed within the upper surface of the substrate holder. The focus ring can further comprise a clamping feature for mechanically clamping the focus ring to the substrate holder. Furthermore, a gas can be supplied to the contact space residing between the one or more contact features on the focus ring and the one or more receiving features on the substrate holder.

Abstract translation: 被配置为联接到衬底保持器的聚焦环包括暴露于过程的第一表面; 与所述第一表面相对的第二表面，用于联接到所述衬底保持器的上表面; 用于面对衬底的周边的内部径向边缘; 和外部径向边缘。 第二表面还包括一​​个或多个接触特征，每个接触特征被配置为与形成在衬底保持器的上表面内的一个或多个接收特征配合。 聚焦环还可以包括用于将聚焦环机械地夹持到基板保持器的夹紧特征。 此外，可以将气体供应到驻留在聚焦环上的一个或多个接触特征与衬底保持器上的一个或多个接收特征之间的接触空间。

公开(公告)号：US07347901B2

公开(公告)日：2008-03-25

申请号：US10721500

申请日：2003-11-26

Applicant: Steven T. Fink ,  Eric J. Strang

Inventor： Steven T. Fink ,  Eric J. Strang

IPC: C23C16/00 ,  H05B3/68

CPC classification number: H01L21/67103 ,  Y10T279/23

Abstract: A thermally zoned substrate holder including a substantially cylindrical base having top and bottom surfaces configured to support a substrate. A plurality of temperature control elements are disposed within the base. An insulator thermally separates the temperature control elements. The insulator is made from an insulting material having a lower coefficient of thermal conductivity than the base (e.g., a gas-or vacuum-filled chamber).

Abstract translation: 一种热分区衬底保持器，其包括基本上圆柱形的基部，其具有构造成支撑衬底的顶表面和底表面。 多个温度控制元件设置在基座内。 绝缘体将温度控制元件热分离。 绝缘体由具有比基底（例如气体或真空填充室）更低的导热系数的绝缘材料制成。

公开(公告)号：US08092602B2

公开(公告)日：2012-01-10

申请号：US11961355

申请日：2007-12-20

Applicant: Steven T. Fink ,  Eric J. Strang

Inventor： Steven T. Fink ,  Eric J. Strang

IPC: C23C16/00 ,  C23C16/46

CPC classification number: H01L21/67103 ,  Y10T279/23

Abstract: A thermally zoned substrate holder including a substantially cylindrical base having top and bottom surfaces configured to support a substrate. A plurality of temperature control elements are disposed within the base. An insulator thermally separates the temperature control elements. The insulator is made from an insulting material having a lower coefficient of thermal conductivity than the base (e.g., a gas- or vacuum-filled chamber).

Abstract translation: 一种热分区衬底保持器，其包括基本上圆柱形的基部，其具有构造成支撑衬底的顶表面和底表面。 多个温度控制元件设置在基座内。 绝缘体将温度控制元件热分离。 绝缘体由具有比基底（例如，气体或真空填充的室）更低的导热系数的绝缘材料制成。

公开(公告)号：US06887341B2

公开(公告)日：2005-05-03

申请号：US10291754

申请日：2002-11-12

Applicant: Eric J. Strang ,  Paul Moroz ,  Steven T. Fink

Inventor： Eric J. Strang ,  Paul Moroz ,  Steven T. Fink

IPC: H05H1/46 ,  B01J19/08 ,  C23C16/50 ,  C23C16/509 ,  H01J37/32 ,  H01L21/3065 ,  H01L21/306 ,  C23C16/00 ,  C23C16/455 ,  C23F1/00

CPC classification number: H01J37/321 ,  H01J37/32623 ,  H01J37/32633

Abstract: A plasma processing apparatus for spatial control of dissociation and ionization and a method for controlling the dissociation and ionization in the plasma. An aspect of the present invention provides a plasma processing apparatus for spatial control of dissociation and ionization includes a process chamber, a plasma generating system configured and arranged to produce a plasma in the process chamber, a substrate holder configured to hold a substrate during substrate processing, a gas source configured to introduce gases into the process chamber, a pressure-control system for maintaining a selected pressure within the process chamber, and, a plurality of partitions dividing the internal volume of the process chamber into one or more spatial zones. These partitions extend from a wall of the process chamber toward said substrate holder.

Abstract translation: 用于解离和电离的空间控制的等离子体处理装置和用于控制等离子体中的离解和离子化的方法。 本发明的一个方面提供了一种用于解离和电离的空间控制的等离子体处理装置，包括处理室，等离子体生成系统，其配置和布置成在处理室中产生等离子体;衬底保持器，其构造成在衬底处理期间保持衬底 构造成将气体引入处理室的气源，用于保持处理室内的选定压力的压力控制系统，以及将处理室的内部容积分成一个或多个空间区域的多个隔板。 这些隔板从处理室的壁朝向所述衬底保持器延伸。

公开(公告)号：US07850782B2

公开(公告)日：2010-12-14

申请号：US11961355

申请日：2007-12-20

Applicant: Steven T. Fink ,  Eric J. Strang

Inventor： Steven T. Fink ,  Eric J. Strang

IPC: C23C16/00 ,  C23C16/46

Abstract: A thermally zoned substrate holder including a substantially cylindrical base having top and bottom surfaces configured to support a substrate. A plurality of temperature control elements are disposed within the base. An insulator thermally separates the temperature control elements. The insulator is made from an insulting material having a lower coefficient of thermal conductivity than the base (e.g., a gas- or vacuum-filled chamber).

公开(公告)号：US09587211B2

公开(公告)日：2017-03-07

申请号：US13452442

申请日：2012-04-20

Applicant: Wayne L. Johnson ,  Steven T. Fink

Inventor： Wayne L. Johnson ,  Steven T. Fink

IPC: C12M1/00 ,  C12M3/00 ,  C12M1/34

CPC classification number: C12M21/02 ,  C12M27/20 ,  C12M31/10 ,  C12M41/00 ,  C12M41/10 ,  C12M41/26 ,  C12M41/32 ,  C12M41/36 ,  C12M43/02

Abstract: A photo-bioreactor system for growing and harvesting photosynthetic organisms includes an interior space partitioned into a plurality of independently controlled reactor cells, each stepped downward along a slope from a first elevation to a second elevation, and a light source coupled to each reactor cell and configured to illuminate the photosynthetic organisms with first and second light-emitting surfaces. The system includes a fluid circulation system coupled to the reactor container and configured to force a continuous flow of fluid through the cell passages.

Abstract translation: 用于生长和收获光合生物的光生物反应器系统包括分隔成多个独立控制的反应器单元的内部空间，每个反应器单元沿着从第一高度到第二高度的斜坡逐步向下，以及耦合到每个反应器单元的光源， 被配置为用第一和第二发光表面照射光合生物。 该系统包括流体循环系统，其耦合到反应器容器并且构造成迫使流体连续流过细胞通道。

公开(公告)号：US07338341B2

公开(公告)日：2008-03-04

申请号：US10976939

申请日：2004-10-29

Applicant: Michael G. Hoeting ,  Steven K. Hurt ,  Steven T. Fink

Inventor： Michael G. Hoeting ,  Steven K. Hurt ,  Steven T. Fink

IPC: A63H3/20

CPC classification number: A63H13/02

Abstract: An animated toy effectively mimics human dance steps such as the Hokey Pokey with upper and lower halves of the torso pivoting about a diagonal waist laterally upwardly sloping to the left so that a left arm may be put forward and back. A spin/shake drive mechanism in a left leg selectively rotates the toy about a spin disk when activated in one direction and rotating a shake cam against the upper half of the torso when activated in another direction, thereby achieving each portion of the dance.

Abstract translation: 一个动画玩具有效地模仿人类的舞步，例如Hokey Pokey，身体的上半部和下半部围绕横向向左倾斜的对角腰部枢转，左臂可以向前和向后倾斜。 左腿中的旋转/摇动驱动机构在一个方向上被激活时选择性地使玩具围绕旋转盘旋转，并且当另一个方向被激活时，使摇动凸轮相对于躯干的上半部旋转，从而实现舞蹈的每一部分。

公开(公告)号：US07166170B2

公开(公告)日：2007-01-23

申请号：US10476883

申请日：2002-05-07

Applicant: Steven T. Fink

Inventor： Steven T. Fink

IPC: C23C16/00 ,  C23C16/50 ,  H01L21/02 ,  H01L21/3065

CPC classification number: H01L21/6719 ,  H01J37/32458 ,  H01L21/67069 ,  H01L21/67236 ,  Y10T29/49948 ,  Y10T29/53 ,  Y10T29/53987

Abstract: A method and system for reducing the cost of a vacuum processing system by utilizing separately fabricated parts for the walls and the tops and bottoms of chambers. Walls are formed from cylinders (e.g., aluminum tubing or rolled ring forgings), and plates are then hermetically sealed to the top and bottom of the cylinder. Fasteners (and the vacuum inside the chamber) clamp the plates to the cylinder.

Abstract translation: 一种减少真空处理系统的成本的方法和系统，该方法和系统通过利用用于壁的壁和顶部和底部的单独制造的部件。 壁由气缸（例如铝管或轧制环锻件）形成，然后将板气密地密封到气缸的顶部和底部。 紧固件（和室内的真空）将板夹紧到气缸。