Invention Grant
- Patent Title: Densely packed standard cells for integrated circuit products, and methods of making same
- Patent Title (中): 用于集成电路产品的密集标准电池及其制造方法
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Application No.: US13893524Application Date: 2013-05-14
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Publication No.: US08975712B2Publication Date: 2015-03-10
- Inventor: Mahbub Rashed , Juhan Kim , Yunfei Deng , Suresh Venkatesan
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L21/336 ; H01L27/088 ; H01L21/8234 ; H01L21/84 ; H01L21/338 ; H01L21/8238 ; G06F17/50

Abstract:
One method disclosed herein includes forming first and second transistor devices in and above adjacent active regions that are separated by an isolation region, wherein the transistors comprise a source/drain region and a shared gate structure, forming a continuous conductive line that spans across the isolation region and contacts the source/drain regions of the transistors and etching the continuous conductive line to form separated first and second unitary conductive source/drain contact structures that contact the source/drain regions of the first and second transistors, respectively. A device disclosed herein includes a gate structure, source/drain regions, first and second unitary conductive source/drain contact structures, each of which contacts one of the source/drain regions, and first and second conductive vias that contact the first and second unitary conductive source/drain contact structures, respectively.
Public/Granted literature
- US20140339647A1 DENSELY PACKED STANDARD CELLS FOR INTEGRATED CIRCUIT PRODUCTS, AND METHODS OF MAKING SAME Public/Granted day:2014-11-20
Information query
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