发明授权
- 专利标题： Temperature stabilization system to stabilize a temperature of an article
- 专利标题（中）： 温度稳定系统，以稳定物品的温度
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申请号： US12999512申请日： 2009-07-22
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公开(公告)号： US08994917B2公开(公告)日： 2015-03-31
- 发明人: Joost Jeroen Ottens , Johannes Henricus Wilhelmus Jacobs
- 申请人： Joost Jeroen Ottens , Johannes Henricus Wilhelmus Jacobs
- 申请人地址： NL Veldhoven
- 专利权人： ASML Netherlands B.V.
- 当前专利权人： ASML Netherlands B.V.
- 当前专利权人地址： NL Veldhoven
- 代理机构： Pillsbury Winthrop Shaw Pittman LLP
- 国际申请： PCT/EP2009/059413 WO 20090722
- 国际公布： WO2010/015511 WO 20100211
- 主分类号： G03B27/52
- IPC分类号： G03B27/52 ; G03B27/58 ; G03B27/32 ; G03F7/20 ; H01L21/67
摘要：
An article support is constructed to support an article. The article support includes a back fill structure constructed to supply and extract a thermal buffering fluid to and from the article support. The back fill structure is connected to an extraction duct that is constructed and arranged to extract at least a gas phase of the thermal buffering fluid from the back fill structure. The back fill structure is connected to a supply duct, constructed and arranged to supply a liquid phase of the thermal buffering fluid to the back fill structure. The back fill structure is arranged to have the thermal buffering fluid brought in a combined liquid and gas phase to thermally connect with the article.
公开/授权文献
- US20110128517A1 LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD 公开/授权日：2011-06-02
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