Invention Grant
- Patent Title: Semiconductor device and manufacturing method of the same
- Patent Title (中): 半导体器件及其制造方法相同
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Application No.: US14016308Application Date: 2013-09-03
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Publication No.: US09041077B2Publication Date: 2015-05-26
- Inventor: Shih-Hung Chen , Erh-Kun Lai
- Applicant: MACRONIX INTERNATIONAL CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L21/28 ; H01L29/78

Abstract:
A semiconductor device and a manufacturing method of the same are provided. The semiconductor device includes a substrate and a stacked structure vertically formed on the substrate. The stacked structure includes a plurality of conductive layers and a plurality of insulating layers, and the conductive layers and the insulating layers are interlaced. At least one of the conductive layers has a first doping segment having a first doping property and a second doping segment having a second doping property, the second doping property being different from the first doping property. The interface between the first doping segment and the second doping segment has a grain boundary.
Public/Granted literature
- US20150060958A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME Public/Granted day:2015-03-05
Information query
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