Invention Grant
US09041904B2 High heat load optics with a liquid metal interface for use in an extreme ultraviolet lithography system
有权
具有用于极紫外光刻系统的液态金属界面的高热负荷光学元件
- Patent Title: High heat load optics with a liquid metal interface for use in an extreme ultraviolet lithography system
- Patent Title (中): 具有用于极紫外光刻系统的液态金属界面的高热负荷光学元件
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Application No.: US13331549Application Date: 2011-12-20
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Publication No.: US09041904B2Publication Date: 2015-05-26
- Inventor: Alton H. Phillips
- Applicant: Alton H. Phillips
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Main IPC: G03B27/52
- IPC: G03B27/52 ; G02B7/18 ; G02B5/08 ; G03F7/20 ; G21K1/06

Abstract:
Methods and apparatus for cooling mirrors in an extreme ultraviolet (EUV) lithography system using a liquid metal interface are described. According to one aspect of the present invention, an apparatus includes a heat exchanger, a mirror assembly, and a first liquid metal interface. The heat exchanger includes at least one well defined therein. The mirror assembly includes a mirror block having a mirrored surface. The mirror assembly also has at least one surface. Finally, the first liquid metal interface includes liquid metal which is contained in the first well. The at least one surface is in contact with the liquid metal to transfer heat from the mirror block to the heat exchanger.
Public/Granted literature
- US20120099088A1 HIGH HEAT LOAD OPTICS WITH A LIQUID METAL INTERFACE FOR USE IN AN EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM Public/Granted day:2012-04-26
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