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发明授权
US09056454B2 Actuator, method of manufacturing the actuator, and liquid droplet ejecting head, liquid droplet ejecting apparatus, and image forming apparatus having the actuator 有权
致动器，制造致动器的方法，液滴喷射头，液滴喷射装置和具有致动器的图像形成装置

Actuator, method of manufacturing the actuator, and liquid droplet ejecting head, liquid droplet ejecting apparatus, and image forming apparatus having the actuator
摘要：
An actuator includes a base member and an electro-mechanical transducer element including a first electrode, an electro-mechanical transducer film, and a second electrode. Further, the base member includes a thin wall part having a concave shape, the electro-mechanical transducer film is formed in a manner such that a film thickness of the electro-mechanical transducer film is gradually reduced from a center part of the electro-mechanical transducer film to both end parts of the electro-mechanical transducer film in at least one direction crossing a film thickness direction of the electro-mechanical transducer film.
摘要（中）：

致动器包括基部构件和包括第一电极，机电换能器膜和第二电极的机电换能器元件。 此外，基底构件包括具有凹形形状的薄壁部分，机电换能器膜以使得机电换能器膜的膜厚度从电机械的中心部分逐渐减小的方式形成 换能器薄膜在与机电换能器薄膜的膜厚度方向交叉的至少一个方向上的机电换能器薄膜的两端部。

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