Invention Grant
- Patent Title: Waveguide coupled surface plasmon polarition photo detector
- Patent Title (中): 波导耦合表面等离子体激元偏振光电检测器
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Application No.: US13856063Application Date: 2013-04-03
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Publication No.: US09063254B2Publication Date: 2015-06-23
- Inventor: Bruce A. Block
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe Williamson & Wyatt PC
- Main IPC: G02B6/00
- IPC: G02B6/00 ; B82Y20/00 ; G02B6/12 ; G02B6/122 ; H01L31/105 ; H01L31/108 ; H01L31/0232

Abstract:
A metal-semiconductor-metal (MSM) device couples light from an optical mode in a waveguide to a surface plasmon polarition (SPP) mode on an electrode surface of the MSM device. Once in an SPP mode, the absorption of light in the semiconductor can take place in a very small area. This may allow for a shrinking of the active detector area and allow for low capacitance, very short transit distance for the electrical carriers and allow for very low voltage devices and/or very high frequency.
Public/Granted literature
- US20130287333A1 WAVEGUIDE COUPLED SURFACE PLASMON POLARITION PHOTO DETECTOR Public/Granted day:2013-10-31
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