Invention Grant
US09063254B2 Waveguide coupled surface plasmon polarition photo detector 有权
波导耦合表面等离子体激元偏振光电检测器

Waveguide coupled surface plasmon polarition photo detector
Abstract:
A metal-semiconductor-metal (MSM) device couples light from an optical mode in a waveguide to a surface plasmon polarition (SPP) mode on an electrode surface of the MSM device. Once in an SPP mode, the absorption of light in the semiconductor can take place in a very small area. This may allow for a shrinking of the active detector area and allow for low capacitance, very short transit distance for the electrical carriers and allow for very low voltage devices and/or very high frequency.
Public/Granted literature
Information query
Patent Agency Ranking
0/0