发明授权
US09064710B2 Transistor with A-face conductive channel and trench protecting well region
有权
具有A面导电沟道和沟槽保护阱区的晶体管
- 专利标题: Transistor with A-face conductive channel and trench protecting well region
- 专利标题(中): 具有A面导电沟道和沟槽保护阱区的晶体管
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申请号: US13482311申请日: 2012-05-29
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公开(公告)号: US09064710B2公开(公告)日: 2015-06-23
- 发明人: Qingchun Zhang , Anant Agarwal , Charlotte Jonas
- 申请人: Qingchun Zhang , Anant Agarwal , Charlotte Jonas
- 申请人地址: US NC Durham
- 专利权人: Cree, Inc.
- 当前专利权人: Cree, Inc.
- 当前专利权人地址: US NC Durham
- 代理机构: Withrow & Terranova, P.L.L.C.
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L29/06 ; H01L29/04 ; H01L29/08 ; H01L29/10 ; H01L29/749 ; H01L29/78 ; H01L29/16
摘要:
A transistor structure optimizes current along the A-face of a silicon carbide body to form an AMOSFET that minimizes the JFET effect in the drift region during forward conduction in the on-state. The AMOSFET further shows high voltage blocking ability due to the addition of a highly doped well region that protects the gate corner region in a trench-gated device. The AMOSFET uses the A-face conduction along a trench sidewall in addition to a buried channel layer extending across portions of the semiconductor mesas defining the trench. A doped well extends from at least one of the mesas to a depth within the current spreading layer that is greater than the depth of the trench. A current spreading layer extends between the semiconductor mesas beneath the bottom of the trench to reduce junction resistance in the on-state. A buffer layer between the trench and the deep well further provides protection from field crowding at the trench corner.
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