Invention Grant
- Patent Title: Multi charged particle beam writing apparatus and multi charged particle beam writing method
- Patent Title (中): 多带电粒子束写入装置和多带电粒子束写入方法
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Application No.: US14256124Application Date: 2014-04-18
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Publication No.: US09076564B2Publication Date: 2015-07-07
- Inventor: Ryoichi Yoshikawa , Munehiro Ogasawara
- Applicant: NuFlare Technology, Inc.
- Applicant Address: JP Numazu-shi
- Assignee: NuFlare Technology, Inc.
- Current Assignee: NuFlare Technology, Inc.
- Current Assignee Address: JP Numazu-shi
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2011-276733 20111219
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H01J37/302 ; G21K5/04 ; G21K5/10 ; H01J37/317 ; H01J37/304 ; B82Y10/00 ; B82Y40/00

Abstract:
A multi charged particle beam writing apparatus according to an embodiment, includes a setting unit to set a second region such that more openings in remaining openings except for an opening through which the defective beam passes are included in the second region, a selection unit to select a mode from a first mode in which a pattern is written on a target object by using multiple beams having passed openings in the second region and a second mode in which multiple writing is performed while shifting a position by using at least one of remaining multiple beams in the state where the defective beam is controlled to be beam off and additional writing is performed for a position which was supposed to be written by the defective beam, and a writing processing control unit to control to write in the mode selected.
Public/Granted literature
- US20140225008A1 MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PARTICLE BEAM WRITING METHOD Public/Granted day:2014-08-14
Information query
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