发明授权
- 专利标题: JFET having width defined by trench isolation
- 专利标题(中): JFET具有由沟槽隔离限定的宽度
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申请号: US13597439申请日: 2012-08-29
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公开(公告)号: US09076760B2公开(公告)日: 2015-07-07
- 发明人: Binghua Hu , Pinghai Hao , Sameer Pendharkar
- 申请人: Binghua Hu , Pinghai Hao , Sameer Pendharkar
- 申请人地址: US TX Dallas
- 专利权人: TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人: TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人地址: US TX Dallas
- 代理商 Jacqueline J. Garner; Frank Cimino
- 主分类号: G01R31/26
- IPC分类号: G01R31/26 ; H01L29/417 ; H01L21/00 ; H01L29/423 ; H01L29/808 ; H01L29/06 ; H01L29/10
摘要:
A junction field-effect transistor (JFET) includes a substrate having a first-type semiconductor surface including a topside surface, and a top gate of a second-type formed in the semiconductor surface. A first-type drain and a first-type source are formed on opposing sides of the top gate. A first deep trench isolation region has an inner first trench wall and an outer first trench wall surrounding the top gate, the drain and the source, and extends vertically to a deep trench depth from the topside surface. A second-type sinker formed in semiconductor surface extends laterally outside the outer first trench wall. The sinker extends vertically from the topside surface to a second-type deep portion which is both below the deep trench depth and laterally inside the inner first trench wall to provide a bottom gate.
公开/授权文献
- US20140062524A1 JFET HAVING WIDTH DEFINED BY TRENCH ISOLATION 公开/授权日:2014-03-06
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