Invention Grant
US09079304B2 Transfer unit, method for controlling the transfer unit, and apparatus and method for treating substrate using the transfer unit
有权
转印单元，转印单元的控制方法以及使用转印单元处理基板的设备和方法
- Patent Title: Transfer unit, method for controlling the transfer unit, and apparatus and method for treating substrate using the transfer unit
- Patent Title (中): 转印单元，转印单元的控制方法以及使用转印单元处理基板的设备和方法
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Application No.: US14065730Application Date: 2013-10-29
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Publication No.: US09079304B2Publication Date: 2015-07-14
- Inventor: Woosung Kim , Myungchan Cho
- Applicant: SEMES CO. LTD.
- Applicant Address: KR Chungcheongnam-do
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-do
- Agency: Carter, DeLuca, Farrell & Schmidt, LLP
- Priority: KR10-2012-0122484 20121031; KR10-2012-0156280 20121228
- Main IPC: G06F19/00
- IPC: G06F19/00 ; B25J9/16 ; B25J11/00 ; H01L21/67 ; H01L21/677 ; H01L21/687
Abstract:
Provided is a transfer unit. The transfer unit includes a robot transferring a substrate and a controller controlling a speed of the robot according to the number of substrates to be transferred by the robot for a preset period. When the number of substrates to be transferred for the preset period increases, the robot increases in moving speed by the controller.
Public/Granted literature
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