公开(公告)号：US10199249B2

公开(公告)日：2019-02-05

申请号：US15266281

申请日：2016-09-15

Applicant: SEMES CO., LTD.

Inventor： Hyunho Lee ,  Myungchan Cho

IPC: H01L21/677 ,  B08B3/04 ,  H01L21/67 ,  H01L21/673

Abstract: An apparatus for treating a substrate, an apparatus for transferring a substrate and a method for transferring a substrate are provided. The substrate treating apparatus comprises a receiving unit having a plurality of vertically arranged substrate supporting members and a transferring unit having an upper transfer member transferring a substrate to the receiving unit. The upper transfer member comprises a first arm and a second that are vertically spaced apart from each other and are independently driven to extend horizontally. A plurality of vertically arranged first hands is connected to the first arm and a single hand is connected to the second arm. According to an embodiment, a plurality of substrates can be transferred to a right position.

公开(公告)号：US09079304B2

公开(公告)日：2015-07-14

申请号：US14065730

申请日：2013-10-29

Applicant: SEMES CO. LTD.

Inventor： Woosung Kim ,  Myungchan Cho

IPC: G06F19/00 ,  B25J9/16 ,  B25J11/00 ,  H01L21/67 ,  H01L21/677 ,  H01L21/687

CPC classification number: B25J9/1651 ,  B25J11/0075 ,  B25J11/0095 ,  H01L21/67276 ,  H01L21/67742 ,  H01L21/68707

Abstract: Provided is a transfer unit. The transfer unit includes a robot transferring a substrate and a controller controlling a speed of the robot according to the number of substrates to be transferred by the robot for a preset period. When the number of substrates to be transferred for the preset period increases, the robot increases in moving speed by the controller.

Abstract translation: 提供了一个转运单元。 传送单元包括机器人传送基板和控制机器人的速度的控制器，该机器人将根据要由机器人传送的基板的数量达预定时间段。 当预设期间要传送的基板数量增加时，机器人通过控制器增加移动速度。

公开(公告)号：US20140121831A1

公开(公告)日：2014-05-01

申请号：US14065730

申请日：2013-10-29

Applicant: SEMES CO. LTD.

Inventor： Woosung Kim ,  Myungchan Cho

IPC: B25J9/16 ,  H01L21/677 ,  B25J11/00

CPC classification number: B25J9/1651 ,  B25J11/0075 ,  B25J11/0095 ,  H01L21/67276 ,  H01L21/67742 ,  H01L21/68707

Abstract: Provided is a transfer unit. The transfer unit includes a robot transferring a substrate and a controller controlling a speed of the robot according to the number of substrates to be transferred by the robot for a preset period. When the number of substrates to be transferred for the preset period increases, the robot increases in moving speed by the controller.

Abstract translation: 提供了一个转运单元。 传送单元包括机器人传送基板和控制机器人的速度的控制器，该机器人将根据要由机器人传送的基板的数量达预定时间段。 当预设期间要传送的基板数量增加时，机器人通过控制器增加移动速度。