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1.发明授权Transfer unit, method for controlling the transfer unit, and apparatus and method for treating substrate using the transfer unit 有权转印单元，转印单元的控制方法以及使用转印单元处理基板的设备和方法公开(公告)号：US09079304B2
公开(公告)日：2015-07-14
申请号：US14065730
申请日：2013-10-29
Applicant: SEMES CO. LTD.
Inventor： Woosung Kim , Myungchan Cho
IPC: G06F19/00 , B25J9/16 , B25J11/00 , H01L21/67 , H01L21/677 , H01L21/687
CPC classification number: B25J9/1651 , B25J11/0075 , B25J11/0095 , H01L21/67276 , H01L21/67742 , H01L21/68707
Abstract: Provided is a transfer unit. The transfer unit includes a robot transferring a substrate and a controller controlling a speed of the robot according to the number of substrates to be transferred by the robot for a preset period. When the number of substrates to be transferred for the preset period increases, the robot increases in moving speed by the controller.
Abstract translation: 提供了一个转运单元。 传送单元包括机器人传送基板和控制机器人的速度的控制器，该机器人将根据要由机器人传送的基板的数量达预定时间段。 当预设期间要传送的基板数量增加时，机器人通过控制器增加移动速度。
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2.发明申请TRANSFER UNIT, METHOD FOR CONTROLLING THE TRANSFER UNIT, AND APPARATUS AND METHOD FOR TREATING SUBSTRATE USING THE TRANSFER UNIT 有权转移单元，用于控制传送单元的方法，以及使用传送单元处理基板的设备和方法公开(公告)号：US20140121831A1
公开(公告)日：2014-05-01
申请号：US14065730
申请日：2013-10-29
Applicant: SEMES CO. LTD.
Inventor： Woosung Kim , Myungchan Cho
IPC: B25J9/16 , H01L21/677 , B25J11/00
CPC classification number: B25J9/1651 , B25J11/0075 , B25J11/0095 , H01L21/67276 , H01L21/67742 , H01L21/68707
Abstract: Provided is a transfer unit. The transfer unit includes a robot transferring a substrate and a controller controlling a speed of the robot according to the number of substrates to be transferred by the robot for a preset period. When the number of substrates to be transferred for the preset period increases, the robot increases in moving speed by the controller.
Abstract translation: 提供了一个转运单元。 传送单元包括机器人传送基板和控制机器人的速度的控制器，该机器人将根据要由机器人传送的基板的数量达预定时间段。 当预设期间要传送的基板数量增加时，机器人通过控制器增加移动速度。
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